一种可自动检测宏观缺陷的AOI设备设计探究  

Design of an AOI Device for Automatically Detecting Macroscopic Defects

作　　者：毛继禹 曹斌 薛凤明 刘滋旺 徐铮 MAO Jiyu;CAO Bin;XUE Fengming

机构地区：[1]北京京东方显示技术有限公司,北京100176

出　　处：《科技创新与应用》2022年第7期1-3,共3页Technology Innovation and Application

摘　　要：目前,TFT-LCD行业CF基板的微观缺陷主要依靠AOI设备进行。AOI的原理是通过五点比对法自动对微观缺陷进行锁定;而基板的宏观品质主要依靠Mura设备进行。Mura设备原理是通过钠灯照射,CCD生成精度较低的基板灰度图像,由作业人员人眼进行缺陷的检测,这种宏观检测方法自动化低,依赖人力,准确率的稳定性也很难保证。就此问题,文章提出一种可以自动检测出宏观缺陷的AOI设备,通过算法的添加和优化,在检出微观缺陷的同时,能够准确的监控及检出宏观缺陷,使得宏观缺陷的检出结果更加准确、自动化程度更高,节约大量的人力,有很强的推广意义。At present, the micro defects of CF substrates in TFT-LCD industry mainly rely on AOI equipment. The principle of AOI is to lock the micro defects automatically by five-point comparison method, while the macroscopic quality of the substrate mainly depends on Mura equipment. The principle of Mura equipment is to illuminate by sodium lamp, and CCD generates a gray image of the substrate with low precision, and the defects are detected by the operator’s human eyes. This macroscopic detection method has low automation, depends on manpower, and the stability of accuracy is difficult to be guaranteed. In order to solve this problem, this paper proposes a kind of AOI equipment which can automatically detect macro defects. Through the addition and optimization of algorithms, while detecting micro defects, it can accurately monitor and detect macro defects, which makes the detection results of macro defects more accurate, reaching a higher degree of automation,saving a lot of manpower, and having a strong significance of promotion.

关 键 词：AOI设备 灰度图像 可换挡型支撑杆 宏观检测机 

分 类 号：TN873.93[电子电信—信息与通信工程]