射频直交比对四极质量分析器性能影响分析  

Analysis of the Influence of RF DC/AC Ratio on the Performance of Quadrupole Mass Analyzer

作　　者：邱云涛 冯焱[1] 成永军[1] 陈联[1] 冯天佑[1] 宋伊 魏宁斐 冉欣 郭文 QIU Yuntao;FENG Yan;CHENG Yongjun;CHEN Lian;FENG Tianyou;SONG Yi;WEI Ningfei;RAN Xin;GUO Wen(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China)

机构地区：[1]兰州空间技术物理研究所真空技术与物理重点实验室,兰州730000

出　　处：《真空与低温》2022年第2期200-204,共5页Vacuum and Cryogenics

基　　金：中央引导地方科技发展资金项目(YDZX20216200003442)。

摘　　要：四极质量分析器是四极质谱仪的核心部件,在四极杆上连接的射频电源中包含直流电压分量和高频交流电压分量,其两者比值会对四极质谱仪的性能产生重要影响。采用四阶龙格库塔方法求解微分方程,对四极质量分析器中离子运动轨迹进行仿真,并设计实验对四极质谱仪样机进行射频模块电学参数调试。结果表明,随着射频直流电压和交流电压比值的升高,四极质谱仪质量分辨能力提高,信号强度降低。The quadrupole mass analyzer is the core part of the quadrupole mass spectrometer.The ratio of DC voltage component and high frequency AC voltage component in the RF module applied on the quadrupole will have an important influence on the performance of the quadrupole mass spectrometer.A four-order Runge-Kutta method is used to solve the differential equation,the ion movement trajectory in the quadrupole mass analyzer is simulated,and experiments are designed to debug the electrical parameters of the quadrupole mass spectrometer.It is found that the mass resolution of the quadrupole mass spectrometer improves and the signal intensity decreases with the increase of the ratio of RF DC to AC voltage.

关 键 词：四极质谱仪 四极质量分析器 四阶龙格库塔法 射频 直交比 

分 类 号：TB773[一般工业技术—真空技术]