基于差极结构的绝对式直线时栅位移传感器研究及测量误差特性分析  

Research on absolute linear time-grating displacement sensor with one-pole-difference structure and analysis of measurement error characteristics

作　　者：陈自然[1,2] 黎锡 冯曦颉 陈鸿友 张桁潇 余海游 CHEN Ziran;LI Xi;FENG Xijie;CHEN Hongyou;ZHANG Hengxiao;YU Haiyou(Engineering Research Center of Mechanical Testing Technology and Equipment,Ministry of Education,Chongqing University of Technology,Chongqing 400054,China;Chongqing Key Laboratory of Time-Grating Sensing and Advanced Testing Technology,Chongqing 400054,China)

机构地区：[1]重庆理工大学机械检测技术与装备教育部工程研究中心,重庆400054 [2]时栅传感及先进检测技术重庆市重点实验室,重庆400054

出　　处：《光学精密工程》2022年第6期667-677,共11页Optics and Precision Engineering

基　　金：国家自然科学基金项目(No.52175495,No.51775075);中国博士后科学基金项目(No.2021M691392);重庆理工大学研究生创新项目(No.clgycx20202075)。

摘　　要：针对传统绝对式位移传感器复杂编码和严苛光刻加工的难题,提出了一种“精机定位+精机测量”的差极结构绝对式时栅位移测量新方法。传感器定尺分为两列对极数相差1的激励绕组,每列激励绕组由空间正交排布的正/余弦绕组构成。通过施加正交激励电流,采用动尺正弦形感应绕组拾取时变磁场,得到两路行波信号。通过信号解耦以精机定位和精机测量的组合测量方式实现绝对位移测量。重点开展了安装高度和安装误差对测量精度的影响分析。实验结果表明安装偏角会导致对极内直流电平和二次谐波误差明显增大,修正后传感器在量程90 mm的范围内,测量精度为±1.2μm,分辨力为0.1μm。Focusing on the problems of complex coding and strict lithography for absolute displacement sensors,a“precise number of pole + precise displacement within a pole”method of absolute displacement measurement using time-grating sensors with a one-pole-difference structure is proposed. The fixed ruler of the sensor comprises two rows of excitation windings with a one-pole-difference structure,which comprises cosine windings and sine windings arranged orthogonally in space. The orthogonal excitation current is applied to the excitation windings,and sinusoid induction windings in the moved ruler are employed to induce a time-varying magnetic field. Then,the two traveling wave signals with one-pole-difference are obtained. After signal decoupling,the absolute displacement can be obtained using the“precise number of pole + precise displacement within pole”method. Measurement accuracy caused by installation height and installation error is analyzed. The results demonstrate that the deflection angles of installation led to an amplitude increases in DC and second harmonics,and after error correction,the measuring accuracy reached ±1. 2 μm within the range of 90 mm. Theoretically,the resolution reached 0. 1 μm.

关 键 词：绝对式位移测量 时栅传感器 差极结构 测量误差分析 

分 类 号：TH711[机械工程—测试计量技术及仪器]