基于气浮轴承的无摩擦气缸设计及参数优化  

Design and parameter optimization of frictionless cylinder based on aerostatic bearing

作　　者：岳友飞 苏星 李自胜[2] 李顺顺 李星占 蔡勇[2] YUE Youfei;SU Xing;LI Zisheng;LI Shunshun;LI Xingzhan;CAI Yong(Institute of Manufacturing Technology,China Academy of Engineering Physics,Mianyang 621900,China;School of Manufacturing Science and Engineering,Southwest University of Science and Technology,Mianyang 621010,China;Hunan Provincial Key Laboratory of High Efficiency and Precision Machining of Difficult-to-Cut Material,Intelligent Manufacturing Institute,Hunan University of Science and Technology,Xiangtan 411201,China)

机构地区：[1]中国工程物理研究院机械制造工艺研究所,四川绵阳621900 [2]西南科技大学制造科学与工程学院,四川绵阳621010 [3]湖南科技大学智能制造研究院难加工材料高效精密加工湖南省重点实验室,湖南湘潭411201

出　　处：《光学精密工程》2022年第6期678-688,共11页Optics and Precision Engineering

基　　金：中国博士后科学基金资助项目(No.2021M693010);国家自然科学基金资助项目(No.11802279)。

摘　　要：针对超精密垂直轴对无摩擦、高稳定性重力平衡系统的需求,本文设计了一种新式无摩擦气缸,并对气浮轴承的参数进行优化。首先,确定气浮轴承初始参数,据此建立基于ANSYS的有限元分析模型,将分析结果与工程计算、实验结果对比,验证仿真计算的可靠性。然后,利用该模型,采用响应面优化方法,得到不同节流孔布置下(对应最佳气膜厚度时)的承载力、耗气量、抗弯力矩,选定最优气膜参数。分析结果表明承载力与节流孔个数呈现非线性变化关系,承载力随节流孔数量增加快速上升后基本保持恒定。采用双排节流孔布置,可以较少的节流孔个数保证抗弯力矩。最后针对优化前后的气缸进行了实验测试,分析发现参数优化后承载力提升约7.7%,抗弯力矩提升约15.7%。本文提出的基于响应面优化的气浮轴承参数优化设计高效可行,优化设计的新式气浮无摩擦气缸能够满足重力平衡系统的使用需求。A frictionless cylinder with an air bearing was proposed to satisfy the demand of an ultra-precision vertical axis for a frictionless and stable gravity balance system.The parameters of the air bearing are optimized.First,the initial parameters of the air bearing are determined;then,an analysis model using ANSYS is established.The calculation results based on the engineering method and the experimental results are used to verify the analysis model.Then,the response surface optimization method is used to obtain the bearing capacity,air consumption,and bending moment under different orifice arrangements(corresponding to the optimal air film thickness),based on the established model.According to the above results,the optimal air bearing parameters are selected.The results demonstrate that a non-linear relationship exists between the bearing capacity and the number of orifices.As the number of orifices increases,the bearing capacity increases rapidly and then remains constant.The arrangement of double-row orifices can ensure a sufficient bending moment with fewer orifices.Finally,the cylinders before and after parameter optimization are tested.The results demonstrate that the bearing capacity increases by about 7.7%and the bending moment increases by about 15.7%after parameter optimization.The parameter optimization of air bearing based on the response surface is efficient and feasible.The proposed air bearing frictionless cylinder can satisfy the requirements of the gravity balance system.

关 键 词：无摩擦气缸 气浮轴承 有限元分析 超精密垂直轴 参数优化 

分 类 号：TP391.4[自动化与计算机技术—计算机应用技术] TH122[自动化与计算机技术—计算机科学与技术]