MIM电容器及其在慢波滤波器设计中的应用  

MIM capacitor and its application in slow-wave filter design

作　　者：冯立营 郑宏兴 范义梅 孙程光 王萌 FENG Liying;ZHENG Hongxing;FAN Yimei;SUN Chengguang;WANG Meng(School of Electronic Engineering,Tianjin University of Technology and Education,Tianjin 300222,China;School of Electronics and Information Engineering,Hebei University of Technology,Tianjin 300401,China;Innetech(Tianjin)Electronic Co.,Ltd.,Tianjin 300385,China)

机构地区：[1]天津职业技术师范大学电子工程学院,天津300222 [2]河北工业大学电子信息工程学院,天津300401 [3]讯创(天津)电子有限公司,天津300385

出　　处：《电子元件与材料》2022年第3期261-265,共5页Electronic Components And Materials

基　　金：国家自然科学基金面上项目(62071166);天津市科技支撑重点研发项目(20YFZCGX00700);天津市企业科技特派员项目(21YDTPJC00210)。

摘　　要：为提升微波电路的集成度,提出了一种基于印刷电路板(PCB)的金属-绝缘体-金属(MIM)电容器,并将其应用在小型化慢波带通滤波器(BPF)设计中。该MIM电容器由一对刻蚀在基板两侧的正方形贴片组成,容值为5.26 pF,远大于传统的交指电容器的容值。进一步将该MIM电容器嵌入到一个传统的开环谐振器(OLR)内部空间中,形成一个慢波OLR。利用该慢波OLR设计了一种小型化二阶慢波BPF。与加载交指电容器的BPF相比,所提出BPF的尺寸缩减了40%。其阻带插入损耗在大于20 dB的频率范围达到其通带中心频率的4.46倍,表明所提出的BPF具有宽阻带特性。实测和仿真结果吻合较好。To improve the integration of the microwave circuits,a metal-insulator-metal(MIM)capacitor based on printed circuit board(PCB)was proposed and applied in the design of miniaturized slow-wave bandpass filter(BPF).The proposed MIM capacitor was consisted of a pair of square patches printed on each side of the dielectric substrate.It has a capacitance of 5.26 pF,which is much larger than that of the conventional interdigital capacitor.The proposed MIM capacitor was embedded into the inside space of a conventional open loop resonator(OLR)to form a slow-wave OLR.This new slow-wave OLR was used to design a miniaturized 2 nd-order slow-wave BPF.The size reduction of 40%was achieved comparing with the interdigital capacitor loaded slow-wave BPF.The frequency range in which the insertion loss in the stopband is larger than 20 dB is up to 4.46 times of passband center frequency,showing that the proposed BPF has a wide stopband.The measured results showed excellent agreement with the simulation.

关 键 词：MIM电容器 开环谐振器 带通滤波器 小型化 宽阻带 

分 类 号：TN713.5[电子电信—电路与系统]