沉积时间对旋转喷涂法制备的NiZn铁氧体薄膜的影响  

Effect of Zn deposition time on NiZn ferrite films prepared by spin-spray deposition

作　　者：王宏 杨仕机 冉茂君 青豪 余忠 孙科 兰中文 WANG Hong;YANG Shi-ji;RAN Mao-jun;QING Hao;YU Zhong;SUN Ke;LAN Zhong-wen(Jiangxi Sunshine Electronic Co,Ltd,Yichun 336202,China;School of Materials and Energy,University of Electronic Science and Technology of China,Chengdu 610054,China)

机构地区：[1]江西尚朋电子科技有限公司,江西宜春336202 [2]电子科技大学材料与能源学院,四川成都610054

出　　处：《磁性材料及器件》2022年第1期1-6,共6页Journal of Magnetic Materials and Devices

摘　　要：采用旋转喷涂法低温沉积制备NiZn铁氧体薄膜,研究了沉积时间对薄膜相结构、显微形貌和磁性能的影响。结果表明,随着沉积时间延长,平均晶粒尺寸逐渐增大,(222)方向择优取向先增强后减弱,沉积速率先减小后稳定,随着薄膜厚度逐渐增大,晶粒的柱状结构也越发明显,结晶性能提高。NiZn铁氧体薄膜的饱和磁化强度M_(s)增高,矫顽力H_(c)降低,100 MHz的磁导率μ′增大,截止频率f_(r)从0.32 GHz降低至0.23 GHz。但是无论沉积时间长短,各薄膜均存在磁损耗角正切(μ"/μ′)过高的问题。In this paper,the spin spray deposition was used to prepare NiZn ferrite films,and the effect of deposition time on the phase structure,micromorphology and magnetic properties of NiZn ferrite films was studied.The results show that as the deposition time increases,the average grain size gradually increases,the preferred orientation of the(222)direction first increases and then decreases,the deposition rate first decreases and then stabilizes,and gradually increases with the film thickness,the columnar structure of the crystal grains becomes more obvious,and the crystallization is improved.The saturation magnetization M_(s) of the NiZn ferrite film increases,the coercivity H_(c) decreases,the permeabilityμ′at 100 MHz increases,and the cut-off frequency f_(r) decreases from 0.32 GHz to 0.23 GHz.However,no matter how long the deposition time is,the dielectric loss tangent of the films is too high.

关 键 词：NiZn铁氧体薄膜 旋转喷涂法 低温沉积 沉积时间 磁性能 

分 类 号：TM273[一般工业技术—材料科学与工程] TB383[电气工程—电工理论与新技术]