射频激励扩散冷却板条CO_(2)激光器技术发展  

Progress of RF Excited Diffusion-cooled Slab CO_(2) Laser

作　　者：罗琪卉 汪于涛 王丽 朱小磊[1] Luo Qihui;Wang Yutao;Wang Li;Zhu Xiaolei(Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Science,Key Laboratory of Space Laser Communication and Detection Technology,Shanghai 201800,China;University of Chinese Academy of Sciences,Center of Materials Science and Optoelectronics Engineering,Beijing 100049,China;Shanghai Institute of Laser Technology,Shanghai Key Laboratory of Laser Beam Micro Processing,Shanghai 200233,China)

机构地区：[1]中国科学院上海光学精密机械研究所,空间激光传输与探测技术重点实验室,上海201800 [2]中国科学院大学,材料与光电研究中心,北京100049 [3]上海市激光技术研究所,上海市激光束精细加工重点实验室,上海200233

出　　处：《应用激光》2022年第1期108-116,共9页Applied Laser

基　　金：上海张江国家自主创新示范区专项发展资金(ZJ2020-ZD-006)。

摘　　要：扩散冷却、射频激励的板条结构CO_(2)激光器具有效率高、体积小和光束质量好的优势,在激光精密退火、工业加工等应用领域越来越被重视。高功率射频激励、扩散冷却板条CO_(2)激光器在千瓦级及以上的CO_(2)激光精密加工及微电子装备中占有重要地位,已成为高功率、高光束质量连续CO_(2)激光器的主流发展方向。就CO_(2)激光器技术发展,重点围绕射频驱动板条结构高功率CO_(2)激光器技术的国内外研究动态进行了调研,梳理了技术发展阶段及应用情况,并对技术发展趋势进行了展望。Slab CO_(2) laser with diffusion-cooling and RF pumping has the advantages of high efficiency,small size and good beam quality,and this kind of laser has been applied in laser precision annealing,industrial processing and some other fields.High-power RF pumped,diffusion-cooled slab CO_(2) laser with more than kilowatts power output plays an important role in the precision processing and micro-electronic equipment because of its high beam quality and high stability.In this paper,the progress of CO_(2) laser technology,focusing on research trends of the RF excited slab structure with high power output,was analyzed in detail,and the development stages and applications of this technology was summarized.Finally,the research tendency of slab CO_(2) laser was prospected.

关 键 词：板条CO_(2)激光器 射频激励 扩散冷却 高功率 

分 类 号：TN249[电子电信—物理电子学]