磁流变抛光关键技术及工艺研究进展  

Research Progress of Key Technology and Process of Magnetorheological Finishing

作　　者：肖强[1] 王嘉琪 靳龙平 XIAO Qiang;WANG Jiaqi;JIN Longping(School of Mechatronic Engineering,Xi’an Technological University,Xi’an 710021,China;Northwest Industry Group Co.,Ltd.,Xi’an 710043,China)

机构地区：[1]西安工业大学机电工程学院,西安710021 [2]西北工业集团有限公司,西安710043

出　　处：《材料导报》2022年第7期59-68,共10页Materials Reports

基　　金：西安市科技计划-科技创新人才服务企业项目(2020KJRC0031);西安市未央区科技计划—产学研协同创新计划项目(201912);陕西省特种加工重点实验室开放基金项目资助(SXTZKFJJ201902);陕西省科技厅重点研发计划项目(2022GY-227)。

摘　　要：随着超光滑平面器件的需求越来越大,要求器件表面粗糙度需达到纳米级,面形精度达到微米级,且无表面和亚表面损伤。传统超精密抛光技术效率低、成本高、不易控制,易产生表面、亚表面损伤,难以满足生产的要求。磁流变抛光技术(MRF)是利用磁流变抛光液在磁场中的流变性对器件表面进行抛光的一种新兴的超精密加工技术,其抛光过程可被有效控制,且能够实现精准抛光,可达到超精密的质量要求。本文对磁流变抛光技术中磁流变液和磁极等关键参数进行了分析和总结,详述了磁流变液的组成部分、常见材料以及三大指标(沉降稳定性、磁力学特性和剪切屈服应力)。研究结果表明,磁流变液的沉降率和稳定性都与磁流变液中的成分密切相关,磁敏微粒不同,磁流变液的沉降率也各有不同,通过使用不同的添加剂改变磁敏微粒的表面活性,从而改变磁流变液的沉降性能;磁流变液的组成部分中磁敏微粒作为唯一有效的导磁材料,影响着磁流变液的磁力学特性;磁场作用下,磁敏微粒逐渐形成链状结构,处于凝聚状态,当磁敏微粒的磁化强度不断增大时,剪切应力也呈现出明显增大的趋势。同时本文综述了磁场发生装置中磁极的不同形态对磁场的影响以及磁极的不同布列方式对磁场和抛光效果的影响,阐述了不同的磁极排列方式对磁场大小和抛光垫均匀性的影响规律。相比其他形状的磁极,圆柱形和方形柱状磁体是最理想的两种永磁体形状。本文总结了目前磁流变抛光技术的工艺研究的新方向,包括集群磁流变抛光技术、可以加工曲面的组合磁流变抛光技术、全球面包络磁流变抛光技术以及超声磁流变复合加工技术,介绍了这几种加工方法的工作原理以及能够达到的工艺效果,最后总结了现阶段磁流变抛光技术研究中存在的问题,并对其今后的发展方向进行了�With the increasing demand for ultra smooth planar components,the surface roughness should reach nanometer level,the surface shape ac-curacy should reach micron level,and there should be no surface and subsurface damage.The traditional ultra precision polishing technology is low efficiency,high cost,difficult to control,easy to produce surface subsurface damage,which is difficult to meet the production requirements.Magnetorheological finishing(MRF)is a kind of ultra precision machining technology which uses the rheological property of MRF slurry in magnetic field.It is a new precision manufacturing method.The polishing process can be effectively controlled,and can achieve precision polishing,which can achieve ultra precision quality requirements.This paper analyzes and summarizes the key contents of magnetorheological fluid and magnetic pole in magnetorheological finishing.The components and common materials of MRF are described in detail,as well as three major indexes:settlement stability,magnetomechanical properties and shear yield stress.The results show that the sedimentation rate and stability of MRF are related to the composition of MRF.The sedimentation rate of MRF is different with different magnetic sensitive particles.Different additives can be used to change the sedimentation performance by changing the surface activity of magnetic sensitive particles.The only component of magnetorheological fluid is magnetic sensitive particle under the action of magnetic field,the magnetic sensitive particles gradually form a chain structure and are in the state of condensation.When the magnetization of the magnetic sensitive particles increases,the shear stress also changes,showing an obvious increase trend.At the same time,the influence of different configuration of magnetic pole on magnetic field and the influence of different arrangement of magnetic pole on magnetic field and polishing effect are summarized.The effects of different arrangement of magnetic poles on the size of magnetic field and the uniformity of

关 键 词：磁流变抛光 磁流变液 磁极 集群磁流变抛光技术 超声磁流变复合加工技术 

分 类 号：TH11[机械工程—机械设计及理论] TH16