基于等效折射率法的短波通滤光膜制备技术  

Preparation Technology of Shortwave Pass Filter Film based on Method of Equivalent Refractive Index

作　　者：张金豹 史成浡 耿浩 杨资阳 ZHANG Jinbao;SHI Chengbo;GENG Hao;YANG Ziyang(Henan Pingyuan Optics&Electronics Co.,Ltd.,Jiaozuo 454001,China)

机构地区：[1]河南平原光电有限公司,河南焦作454001

出　　处：《新技术新工艺》2022年第3期36-40,共5页New Technology & New Process

摘　　要：军用光电系统通常包含白光成像、微光夜视、激光测距、激光制导、红外探测等多项功能,而短波通滤光膜以其特有的光学特性可以对这些光谱区域进行区分选择,便于实现光电系统的多光路设计,因此得到了广泛的应用。通过阐述短波通滤光膜设计方法和对称膜堆等效折射率特性,分析了膜系结构产生高级次截止带的原因是高级次带等效折射率为虚数,提出了利用等效折射率法抑制高级次截止带展宽通带制备短波通滤光膜的技术,所设计出的多单元周期的短波通滤光膜膜系标准结构在高级次带等效折射率为实数,使得高级次截止带变为了通带,利用离子源辅助技术制备膜层后,达到了在45°倾斜测试下400~900 nm,Tave≥92%,1064 nm,Tave≥92%,1570 nm,Rave≥92%的分光水平,膜层质量满足JB/T 8226.8—1999检测标准。同时随着多单元周期膜系结构中周期次数的增加,可以在不影响通带宽度的情况下,进一步提升截止深度,抑制杂散光干扰,优化超宽带短波通滤光膜光谱性能。Military optic-electro systems usually included white light imaging,low light level night vision,and laser ranging,laser guide,infrared detection and other functions,shortwave pass filter film could distinguish and select these spectral regions because its unique optical characteristics,which was convenient to realize the multi-path design of optic-electro systems,so it has been widely used.By expounding the design method of shortwave pass filter films and the equivalent refractive index characteristics of the symmetrical film stack,the reason for the formation of high-order cut-off band in film system structure was that the equivalent refractive index of high-order band was an imaginary number.It was put forward that the preparation technology of shortwave pass filter film by using the equivalent refractive index method to suppress the high-order cut-off band and broaden the pass-band,the designed multi unit periodic shortwave pass filter film system standard structure had a real equivalent refractive index in the high-order band,so that the high-order cut-off band became the pass band,after the film was prepared by ion source assisted technology,under 45°inclined test,the spectral level were achieved with 400~900 nm,Tave≥92%,1064 nm,Tave≥92%,1570 nm,Rave≥92%,and the film quality met JB/T 8226.8—1999 test standard.At the same time,with the increase of the number of cycles in the multi unit periodic film structure,the cut-off depth could be further improved without affecting the pass-band width,the stray light interference could be suppressed,and the spectral performmance of ultra wideband short wave pass filter could be optimized.

关 键 词：光学薄膜 短波通滤光膜 通带 截止带 等效折射率 对称 

分 类 号：O436[机械工程—光学工程]