激光微纳连接技术研究进展  

Research Progress of Laser Micro-Nano Connection Technology

作　　者：张丽丽 孙树峰 王茜 张丰云 王萍萍 曹成铭 张子宾 Zhang Lili;Sun Shufeng;Wang Xi;Zhang Fengyun;Wang Pingping;Cao Chengming;Zhang Zibin(School of Mechanical and Automotive Engineering,Qingdao University of Technology,Qingdao,Shandong 266520,China;Shandong Research Center of Laser Green and High Efficiency Intelligent Manufacturing Engineering Technology,Qingdao,Shandong 266520,China;School of Mechanical and Electrical Engineering,China University of Mining and Technology,Xuzhou,Jiangsu 221116,China;Shandong Energy Heavy Industry Group Hengtu Technology Co.,Ltd.,Taian,Shandong 271222,China;Qingdao Gocci OptoElectronics Technology Co.,Ltd.,Qingdao,Shandong 266109,China)

机构地区：[1]青岛理工大学机械与汽车工程学院,山东青岛266520 [2]山东省激光绿色高效智能制造工程技术研究中心,山东青岛266520 [3]中国矿业大学机电工程学院,江苏徐州221116 [4]山东能源重装集团恒图科技有限公司,山东泰安271222 [5]青岛国骐光电科技有限公司,山东青岛266109

出　　处：《激光与光电子学进展》2022年第3期22-39,共18页Laser & Optoelectronics Progress

基　　金：国家自然科学基金面上项目(51775289);山东省自然科学基金重大项目(ZR2018ZB0524);山东省重点研发计划项目(2019GGX104097)。

摘　　要：激光微纳连接技术是实现微纳米结构、电子元器件批量化生产的基础,是微纳制造领域的关键技术。在简要介绍微纳连接技术的应用需求和主要技术方法的基础上,重点对微纳尺度的激光连接技术进行了分析和论述。首先介绍了激光连接技术的尺寸范围,然后根据其工艺特性的不同选取三种典型的激光微纳连接技术,即激光微焊接,微纳尺度的激光软钎焊和激光植球,分别论述该三种技术的加工原理及特点、工艺参数和应用现状。通过对激光微纳连接技术工艺参数的研究和应用现状的总结,探讨激光微纳连接技术在航空航天、微电子封装、医疗器件等领域的重要应用,并对激光微纳连接技术的发展方向和未来研究工作进行了总结。Laser micro-nano connection connection technology is the basis for mass production of micro-nano structures and electronic components,and is a key technology in the field of micro-nano manufacturing.Based on a brief introduction to the application requirements and main technical methods of micro-nano connection technology,this paper focuses on the analysis and discussion of the micro-nano-scale laser connection technology.Firstly,the dimension range of laser connection technology is introduced,and then three typical laser micro-nano connection technologies are selected according to the different process characteristics,namely laser micro welding technology,micro-nano-scale laser soldering technology and laser soldering bumping technology,the research on the processing principles and characteristics,process parameters and application status of the three technology are reviewed,respectively.Through the summary of the research and application status of laser micro-nano connection technology,this paper discusses the important role of laser micro-nano connection technology in the field of aerospace,microelectronic packaging,medical device,etc.,and summarizes the development direction and future research work of laser micro-nano connection technology.

关 键 词：激光光学 激光微纳连接 激光微焊接 激光软钎焊 激光植球 

分 类 号：TN249[电子电信—物理电子学]