基于MBD的半导体设备模型验证平台及应用  

Semiconductor device model verification platform and its application based on MBD

作　　者：汪杰君[1] 任星晓 王秀秀 WANG Jiejun;REN Xingxiao;WANG Xiuxiu(School of electronic engineering and automation,Guilin University of Electronic Science and technology,Guilin Guangxi 541004,China)

机构地区：[1]桂林电子科技大学电子工程与自动化学院,广西桂林541004

出　　处：《自动化与仪器仪表》2022年第3期203-208,212,共7页Automation & Instrumentation

基　　金：国家自然科学基金(41561079);国家科技重大专项(02专项)子课题(No.2017ZX02101007-003)。

摘　　要：为提高对准精度,晶圆在对准过程中,需要对设备在运动过程中产生的误差进行补偿处理。设计测校策略用于误差项的检测,但测校策略的有效性却难以在正式运用前得到验证。使用MATLAB对晶圆对准过程进行模拟仿真,可实现工件台带动晶圆移动,相机拍照等基础功能。在平台中注入不同误差项,模拟真实设备运动产生的误差,此验证平台可以运行测校策略,实现误差的检验,对比注入误差,得到测校策略的正确性。In order to improve the precision of the wafer,it is necessary to compensate the errors caused by the equipment in the process of wafer alignment.A calibration strategy is designed to detect error terms,but the effectiveness of the calibration strategy is difficult to be verified before formal application.Using MATLAB to simulate the wafer alignment process,it can realize the basic functions such as the Motion Stage driving the wafer to move and the camera taking pictures.Different error terms are injected into the platform to simulate the errors generated by the real equipment movement.This verification platform can run the test and calibration strategy,realize the test of errors,compare the injection errors,and obtain the correctness of the test and calibration strategy.

关 键 词：测校策略 晶圆对准 坐标系转换 验证平台 

分 类 号：TP29[自动化与计算机技术—检测技术与自动化装置] O436.1[自动化与计算机技术—控制科学与工程]