一种高速高能效时域温度传感器  

A High-conversion-rate and High-energy-efficiency Time-domain Temperature Sensor

作　　者：王子轩[1,2] 王鑫 黄康琪 杜逸飞 王乾宇 姚佳飞 WANG Zixuan;WANG Xin;HUANG Kangqi;DU Yifei;WANG Qianyu;YAO Jiafei(College of Electronic and Optical Engineering&College of Microelectronics,Nanjing University of Posts and Telecommunications,Nanjing,210023,CHN;National and Local Joint Engineering Laboratory of RF Integration and Micro-assembly Technology,Nanjing University of Posts and Telecommunications,Nanjing,210023,CHN)

机构地区：[1]电子与光学工程学院、微电子学院,南京邮电大学,南京210023 [2]射频集成与微组装技术国家地方联合工程实验室,南京邮电大学,南京210023

出　　处：《固体电子学研究与进展》2022年第1期50-57,共8页Research & Progress of SSE

基　　金：国家自然科学基金青年基金资助项目(61504061)。

摘　　要：高能效温度传感器在物联网(Internet of thing,IoT)系统中有着极为广泛的应用。提出了一种基于流水线型时间-数字转换器(Time-to-digital converter,TDC)的时域温度传感器,该温度传感器中的TDC电路采用了一种具有高线性度的可编程时间放大器(Programmable-gain time amplifier,PGTA),使温度传感器的分辨率得到了较大提高。由于该流水线型TDC的转换速率高达约30 ns/conversion,使温度传感器具备高速的特点;又因为IoT系统通常采用周期性工作/关断模式,因而该温度传感器非常适用于IoT应用中。提出的温度传感器在台积电40nm工艺下进行了流片验证,测试结果表明,该温度传感器在-20~80℃范围内实现了90 mK的分辨率,测温时间为1.5μs。在0.7 V电源电压下工作电流为6μA,实现了51 fJ·K^(2)的品质因子。High-energy-efficiency temperature sensors are widely applied in internet of thing(IoT)systems. This paper presents a time-domain temperature sensor based on a pipeline-type time-to-digital converter(TDC). The proposed TDC uses a high-linearity programmable-gain time amplifier(PGTA),thanks to which the resolution of the sensor is largely improved. The conversion time of the TDC is about 30 ns/conversion,so that the sensor has a high conversion rate. Therefore,the sensor is very suitable for IoT systems that usually work on duty-cycling mode. The proposed temperature sensor has been fabricated in TSMC 40 nm technology. The experiment results show that the resolution is about 90 mK from-20 ℃ to 80 ℃,the conversion time is about 1.5 μs. The circuit consumes 6 μA@0.7 V and achieves a Figure-of-merit(FoM)of 51 fJ·K^(2).

关 键 词：时域温度传感器 高速温度传感器:高能效 高线性度 物联网应用 

分 类 号：TP333[自动化与计算机技术—计算机系统结构]