扫描射流掩膜电解加工微坑阵列试验研究  

Experimental Study on Electrode Machining of Micro-Pit Arrays by Scanning Jet Mask

作　　者：庄怀印 郭钟宁[1] 吴明[1] 王俊杰 ZHUANG Huai-yin;GUO Zhong-ning;WU Ming;WANG Jun-jie(School of Electromechanical Engineering Guangdong University of Technology.Guangdong Guangzhou 510006,China)

机构地区：[1]广东工业大学机电工程学院,广东广州510006

出　　处：《机械设计与制造》2022年第3期139-143,共5页Machinery Design & Manufacture

基　　金：国家自然科学基金(51575113)。

摘　　要：表面织构在摩擦学、热能交换以及生物医学等许多领域发挥重要作用,其中微坑阵列是常用的表面织构。为了能在金属表面制造出微坑织构,对掩膜电解加工微坑阵列的文献进行了研究与分析,在分析了射流掩膜电解加工技术的基础上,提出使用一种扫描射流掩膜电解加工的方法,利用光刻胶做掩膜,成功地在不锈钢上加工出海量微坑阵列。设计实验,探究了电压、扫描速度对微坑尺寸、深径比、侧蚀系数和一致性的影响规律。最后,优选实验参数,用加工电压30V、描速度2mm/s加工出22500个微坑阵列。Surface texture plays an important role in many fields such as tribology,heat exchange,and biomedicine. Micro-pit arrays are commonly used surface textures. In order to fabricate the micro-pit texture on the metal surface,the literature on the electrolytic processing of micro-pit arrays was studied and analyzed. Based on the analysis of the jet mask electrolytic processing technology,a scanning jet mask electrolysis was proposed. The processing method uses a photoresist as a mask to successfully process a large number of micro-pit arrays on stainless steel. Design experiments were carried out to investigate the effects of voltage and scanning speed on micro-pit size,aspect ratio,lateral erosion coefficient and consistency. Finally,the experimental parameters are preferred,and 22,500 micro-pit arrays are processed with a processing voltage of 30V and a drawing speed of 2 mm/s.

关 键 词：掩膜电解:微坑阵列 扫描射流 微米级 

分 类 号：TH16[机械工程—机械制造及自动化] TG662[金属学及工艺—金属切削加工及机床]