一种调频连续波干涉仪激光波长稳定性测量方法  

New Method for Measuring Laser Wavelength Stability by Using Frequency-Modulated Continuous Wave Interferometer

作　　者：郭媛 郑刚 盛启明 聂梦笛 白浪 韩园 Guo Yuan;Zheng Gang;Sheng Qiming;Nie Mengdi;Bai Lang;Han Yuan(School of Opto-Electronic Engineering,Xi'an Technological University,Xi'an,Shaanxi 710021,China;School of Electronic Information Engineering,Xi'an Technological University,Xi'an,Shaanxi 710021,China)

机构地区：[1]西安工业大学光电工程学院,陕西西安710021 [2]西安工业大学电子信息工程学院,陕西西安710021

出　　处：《中国激光》2022年第4期12-19,共8页Chinese Journal of Lasers

摘　　要：针对调频连续波干涉测量系统中半导体激光光源存在波长漂移的问题,提出了一种基于干涉腔的调频连续波激光波长稳定性测量方法。首先推导了波长漂移量的测量理论,确定了位移-波长漂移量的变化系数,然后设计了拍频信号波长漂移量的解调算法,最后搭建了调频连续波干涉腔测量系统并进行了实验验证。结果表明,波长漂移量的测量分辨率为0.016 pm,波长漂移解算速度达50/s(测量时间为0.02 s),相比光学拍频法和干涉比较法,测量速度有较大的提高。激光器持续工作1 h,测量标准差为0.049 pm,平均中心波长稳定性在0.19×10^(-6)内。该方法在光纤传感和精密干涉测量领域有较好的应用价值。Objective With the rapid development of laser interferometry technologies,the industrial production has put forward higher accuracy requirements for precision machining,optical detection,assembly measurement,etc.For example,the displacement detection of components in computer numerical control machine tools,the deformation detection of bridges and dams,and the internal pressure monitoring of missile guidance all need precise measurements.As the benchmark of interferometry,laser wavelength directly affects measurement accuracy,thus measuring the stability of laser wavelength is of great significance for analyzing the accuracy of interferometry.According to the physical phenomena,the existing laser wavelength stability measurement methods can be divided into optical beating method,interference comparator method,and specific wavelength sensitive material characteristics based method.These methods have a high wavelength measurement resolution,but need a reference laser,which inevitably increases the cost of a measuring equipment.Frequency-modulated continuous wave(FMCW) interferometry technology has the advantages of strong anti-interference ability,high measurement accuracy,and the ability to measure distances,displacements,temperatures and other physical quantities.This paper proposes a frequency-modulated continuous wave interferometric cavity measurement method,which has the advantages of short measurement time,no reference laser,simple optical structure,low cost,and high measurement resolution.This method has high application value in the fields of optical fiber sensing and precision interferometry.Methods In order to realize the measurement of laser wavelength drifts,a method of frequency-modulated continuous wave laser wavelength stability measurement based on interferometric cavity is proposed.Firstly,the measurement theory of wavelength shifts is deduced.When the cavity length is constant,the shift of the initial phase is caused by the average center wavelength shift,which leads to the " displacement" in the

关 键 词：测量 调频连续波 干涉腔测量法 激光器 波长稳定性 

分 类 号：TN247[电子电信—物理电子学]