Finite element simulation of Love wave sensor for the detection of volatile organic gases  

作　　者：Yan Wang Su-Peng Liang Shu-Lin Shang Yong-Bing Xiao Yu-Xin Yuan 王艳;梁苏鹏;商树林;肖勇兵;袁宇鑫&(College of Electronic and Optical Engineering & College of Microelectronics,Nanjing University of Posts and Telecommunications,Nanjing 210046,China)

机构地区：[1]College of Electronic and Optical Engineering & College of Microelectronics,Nanjing University of Posts and Telecommunications,Nanjing 210046,China

出　　处：《Chinese Physics B》2022年第3期241-247,共7页中国物理B（英文版）

基　　金：Project supported by the Foundation of Nanjing University of Posts and Telecommunications, China (Grant No. NY213018)。

摘　　要：The three-dimensional(3D) finite element(FE) simulation and analysis of Love wave sensors based on polyisobutylene(PIB) layers/SiO_(2)/ST-90°X quartz structure are presented in this paper, as well as the investigation of coupled resonance effect on the acoustic properties of the devices. The mass sensitivity of the basic Love wave device with SiO_(2)guiding layers is solved analytically. And the highest mass sensitivity of 128 m^(2)/kg is obtained as h_(s)/λ = 0.175. The sensitivity of the Love wave sensors for sensing volatile organic compounds(VOCs) is greatly improved due to the presence of coupled resonance induced by the PIB nanorods on the device surface. The frequency shifts of the sensor corresponding to CH_(2)Cl_(2),CHCl_(3), CCl_(4), C_(2)Cl_(4), CH_(3)Cl and C_(2)HCl_(3) with the concentration of 100 ppm are 1.431 kHz, 5.507 kHz, 13.437 kHz,85.948 kHz, 0.127 kHz and 17.879 kHz, respectively. The viscoelasticity influence of the sensitive material on the characteristics of SAW sensors is also studied. By taking account of the viscoelasticity of the PIB layers, the sensitivities of the SAW sensors with the PIB film and PIB nanorods decay in different degree. The gas sensing property of the Love wave sensor with PIB nanorods is superior to that of the PIB films. Meanwhile, the Love wave sensors with PIB sensitive layers show good selectivity to C_(2)Cl_(4), making it an ideal selection for gas sensing applications.

关 键 词：gas sensor coupled resonance NANO-STRUCTURE Love wave 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]