稀土钙氧硼酸盐高温压电晶体及其传感器件  

Rare-earth Calcium Oxyborate High-temperature Piezoelectric Crystals and Sensors

作　　者：于法鹏 姚贵腾 王国良 刘学良 赵显[1,3] YU Fapeng;YAO Guiteng;WANG Guoliang;LIU Xueliang;ZHAO Xian(State Key Laboratory of Crystal Materials and Institute of Crystal Materials,Shandong University,Jinan 250100,China;Shandong Original Crystal Technology Co.,LTD,Jinan 250100,China;Center for Optics Research and Engineering,Shandong University,Qingdao 266200,Shandong,China)

机构地区：[1]山东大学,晶体材料国家重点实验室,济南250100 [2]山东本源晶体科技有限公司,济南250100 [3]山东大学光学高等研究中心,山东青岛266200

出　　处：《硅酸盐学报》2022年第3期563-574,共12页Journal of The Chinese Ceramic Society

基　　金：国家自然科学基金(51872165);山东省重大科技创新工程项目(2019JZZY010313);山东省自然科学基金(ZR2020KA003)。

摘　　要：稀土钙氧硼酸盐RECa4O(BO3)3(RECOB,RE:Y和稀土元素)系列晶体具有高的熔点、高的电阻率、低的介电损耗和适中的压电活性,是一类重要的高温压电晶体材料。介绍了该类晶体的提拉法制备工艺、宽温域电弹性能表征及其在高温传感技术领域的研究新进展,包括以该类晶体为基础的高温声表面波温度传感器件、高温压电换能器件以及高温振动加速度传感器件,阐述了该类高温压电晶体与传感器件在工业领域中的潜在应用及技术优势。Rare-earth calcium oxyborate crystals(i.e., RECa_(4)O(BO_(3))_(3), RECOB, RE:Y and rare-earth elements) are promising piezoelectric materials for high-temperature sensing application due to their high melting point, highs electrical resistivity, low dielectric loss and moderate piezoelectric activity. Single crystal growth of RECOB crystals was introduced, the characterization of electro-elastic properties and the research progress of RECOB piezoelectric crystals in the high-temperature sensing field were represented. High-temperature surface acoustic wave sensor for temperature sensing, high-temperature piezoelectric transducers and vibration sensors were described. The potential applications and technical advantages of RECOB crystals and related sensors were introduced.

关 键 词：稀土钙氧硼酸盐晶体 提拉法 晶体生长 高温压电 传感应用 

分 类 号：O738[理学—晶体学]