集成电路洁净室空调方案节能分析  

Energy Saving Analysis of Integrated Circuit Cleanrooms Air Conditioning Solution

作　　者：赵阳 Zhao Yang

机构地区：[1]倍杰特集团股份有限公司

出　　处：《洁净与空调技术》2022年第1期120-125,共6页Contamination Control & Air-Conditioning Technology

摘　　要：集成电路洁净室净化空调系统能耗巨大,合理利用洁净室内的各种能源能够降低集成电路工厂的产品成本,提高企业的产品竞争力,对集成电路产业发展有良好的促进作用,针对集成电路洁净室空调方案进行对比分析,提出一种较为节能的空调系统方案。Air conditioning system for cleanrooms of integrated circuits consumes a lot of energy.The rational use of various energy sources in the cleanroom can reduce the product cost of integrated circuit factories,improve the product competitiveness of enterprises,and have a good role in promoting the development of the integrated circuit industry.The different solutions of circuit cleanrooms air conditioning are compared and analyzed in this article,and a more energy saving air conditioning system e is proposed.

关 键 词：集成电路洁净室 净化空调系统 节能分析 

分 类 号：TU831.8[建筑科学—供热、供燃气、通风及空调工程]