基于CMOS高密度微电极阵列芯片的研究与设计  

Research and design of high-density microelectrode array chip based on CMOS

作　　者：李丹凤 高超嵩[1] 孙向明 LI Danfeng;GAO Chaosong;SUN Xiangming(College of Physical Science and Technology,Central China Normal University,Wuhan 430079,China)

机构地区：[1]华中师范大学物理科学与技术学院,湖北武汉430079

出　　处：《电子设计工程》2022年第7期15-20,25,共7页Electronic Design Engineering

基　　金：国家自然科学基金青年项目(11805080);国家重点研发计划项目(2016YFE0100900)。

摘　　要：为了使非侵入性电极在研究大脑神经活动中可避免愈伤组织与免疫反应的目的,在GSMC130 nm工艺上设计并制备了一款可对神经细胞进行电刺激的高密度微电极阵列芯片,可精确地刺激个别目标神经元,并记录其电位变化。该芯片是由128行×128列像素和读出电路组成,像素整列采用卷帘式读出,每个像素由微电极及其信号处理电路组成,其像素面积为36.5μm×25.5μm。采用Cadence仿真软件对电路进行仿真,仿真结果表明,该芯片可用于高空间分辨率神经元网络活动的记录:工作电压为3.3 V,等效电荷噪声ENC为27e^(-),上升时间为1μs。For the purpose of non-invasive study of brain activity in the electrodes can be avoided callus tissue and immune response,a high-density microelectrode array chip that can electrically stimulate nerve cells is designed and prepared on the GSMC 130 nm process.Precisely stimulate individual target neurons and record their potential changes.The chip is composed of 128 rows×128 columns of pixels and readout circuits.The entire column of pixels is read out in a rolling shutter type.Each pixel is composed of a microelectrode and its signal processing circuit.Its pixel area is 36.5μm×25.5μm.The circuit is simulated by Cadence simulation software.The simulation results show that the chip can be used to record neuron network activities with high spatial resolution:the working voltage is 3.3 V,the equivalent charge noise ENC is 27e^(-),and the rise time is 1μs.

关 键 词：微电极阵列 高密度 刺激模式 细胞外记录与刺激 高空间分辨率 集成电路 

分 类 号：TN432[电子电信—微电子学与固体电子学]