薄基材过滤片飞秒激光精密加工  

Precision Machining of Thin Substrate Filter by Femtosecond Laser

作　　者：武胜勇[1] 麻剑平 孙慧丽[1] 张志伟[1] 刘国梁[1] WU Shengyong;MA Jianping;SUN Huili;ZHANG Zhiwei;LIU Guoliang(Beijing Institute of Control Engineering,Beijing 100190,China)

机构地区：[1]北京控制工程研究所,北京100190

出　　处：《电加工与模具》2022年第S01期41-45,共5页Electromachining & Mould

摘　　要：利用飞秒激光非热熔性烧蚀的加工特性,以钛箔材质的过滤片零件为加工对象,研究了飞秒激光在钛箔材料微槽结构及外形加工方面的应用,并针对加工需求开发了易氧化薄基材的定位夹具和防氧化技术。试验中通过优化离焦量、加工速度和激光能量等参数,得到了过滤片边缘形貌和底部形貌受激光能量密度的影响规律,最终实现了过滤片零件的精密加工,为薄基材易氧化材料微槽结构零件的加工提供了新思路。With the titanium foil filter parts being taken as the machining object,the machining characteristic of non-thermal melt ablation of femtosecond laser was used to study the application of femtosecond laser in microgroove structure and shape machining of titanium foil,and the positioning fixture and anti-oxidation technology for easily oxidized thin substrates were developed according to the machining requirements. In this study,the effect law of laser energy density on the edge and bottom morphologies of the filter was studied by optimizing the defocusing amount,machining speed and laser energy. Thus,the precision machining of the filter parts was finally realized,which provides a new idea for the machining of the microgroove structure parts of thin substrate easily oxidized material.

关 键 词：飞秒激光 扫描振镜法 微槽结构 钛箔 

分 类 号：TG665[金属学及工艺—金属切削加工及机床]