基于马赫-曾德干涉仪的色散转折效应及其传感性能模拟研究  

Numerical Study on Dispersion Turning Effect Based on Mach-Zehnder Interferometers and Its Sensing Performance

作　　者：黄田野 雷蓉蓉 程卓[1] 张祥莉[1] 王勇[1] 罗大鹏[1] 许桂珍 张港顺 吴易恒 潘建行 Huang Tianye;Lei Rongrong;Cheng Zhuo;Zhang Xiangli;Wang Yong;Luo Dapeng;Xu Guizhen;Zhang Gangshun;Wu Yiheng;Pan Jianxing(School of Mechanical Engineering and Electronic Information,China University of Geosciences(Wuhan),Wuhan,Hubei 430074,China)

机构地区：[1]中国地质大学(武汉)机械与电子信息学院,湖北武汉430074

出　　处：《光学学报》2022年第5期121-129,共9页Acta Optica Sinica

基　　金：国家自然科学基金(61605179,61973283);武汉市科技局项目(2018010401011297)。

摘　　要：设计了工作在近红外波段的硅基马赫-曾德尔干涉仪(MZI)折射率传感器。理论和仿真模拟分析表明,通过改变MZI的结构参数可以对输出干涉谱的色散转折特性进行调控,经过优化后色散转折点(DTP)所对应的波长可以调至近红外波段(1550 nm),通过改变MZI周围的环境折射率(SRI)可以使折射率灵敏度达到37500 nm/RIU。由于DTP两侧的干涉条纹对外界折射率响应有相反的特性,将干涉波谷的相对漂移量作为检测对象,能够将灵敏度提高2倍,即75000 nm/RIU。不同于常规基于光栅和波导耦合构架的DTP传感器,所设计的DTP结构中两个干涉模式互不相关且均可独立调控,并可根据需要灵活调控色散转折波长。In this paper, a silicon-based Mach-Zehnder interferometer(MZI) refractive index sensor working in the near infrared band is designed. Theoretical and simulation analysis show that the dispersion turning characteristics of the output interference spectrum can be regulated by changing the structural parameters of MZI. After optimization, the wavelength corresponding to the dispersion turning point(DTP) can be adjusted to the near-infrared band(1550 nm). By changing the ambient refractive index(SRI) around the MZI, the refractive index sensitivity can reach 37500 nm/RIU. Since the interference fringes on both sides of DTP have opposite characteristics to the refractive index response of the outside world, taking the relative drift of the interference trough as the detection object can improve the sensitivity by two times, the value is 75000 nm/RIU. Different from conventional DTP sensor based on grating and waveguide coupling structure, the two interference modes in the designed DTP structure are unrelated and can be adjusted independently, and the dispersion transition wavelength can be adjusted flexibly according to the needs.

关 键 词：集成光学 传感器 波导耦合 近红外 马赫曾德干涉仪 色散转折点 环境折射率 

分 类 号：O436[机械工程—光学工程]