面向板级光互连应用的柔性聚合物波导的制备及其性能评价  

Fabrication and Performance Evaluation of Flexible Polymer Waveguides for Board-Level Optical Interconnection Application

作　　者：刘晓锋 王国栋 姚腾飞 李永凯 马麟[3] 缪桦 孙蓉[1] Liu Xiaofeng;Wang Guodong;Yao Tengfei;Li Yongkai;Ma Lin;Miao Hua;Sun Rong(Shenzhen Institute of Advanced Technology,Chinese Academy of Sciences,Shenzhen,Guangdong 518055,China;Shennan Circuits Co.,Ltd.,Shenzhen r Guangdong 518117,China;State Key Laboratory of Advanced Optical Communication Systems and Networks,Shanghai Jiao Tong University,Shanghai 200240,China)

机构地区：[1]中国科学院深圳先进技术研究院,广东深圳518055 [2]深南电路股份有限公司,广东深圳518117 [3]上海交通大学区域光纤通信网与新型光通信系统国家重点实验室,上海200240

出　　处：《光学学报》2022年第5期189-196,共8页Acta Optica Sinica

基　　金：广东省重点研发计划(2020B010180001)。

摘　　要：现有的柔性波导器件存在加工制备难、机械柔韧性有限、可靠性程度低等难题。基于中性面理论,以聚酰亚胺(PI)薄膜为衬底,设计并制作了具有三明治叠层结构的柔性多模聚合物波导,通过多层中性面的构筑赋予柔性波导优异的结构可靠性和机械柔韧性。所制备的柔性聚合物波导具有低传输损耗(0.16 dB/cm@850 nm)和低通道串扰(<-40 dB)的特性。通过微机械设计使在机械变形过程中施加在波导芯层上的应变最小化,波导表现出优良的机械弯曲性能,其最小弯曲半径低至3 mm,且以1 mm弯曲半径弯曲1000次后,其传输损耗无明显增加。可靠性测试实验结果表明,柔性波导具有优异的热稳定性、耐老化性能以及可加工性能,经过湿度循环、温度循环以及无铅回流焊处理后,波导的传输性能并未发生明显劣化。该研究为具有优异机械柔性和环境可靠性的柔性聚合物波导的规模化生产和应用提供了一定的理论与技术指引。Challenges exist in current flexible waveguide devices, such as the fabrication difficulties, mechanical flexibility limitation, and poor reliability. Based on the neutral-plane theory, flexible multimode polymer waveguides with a sandwich structure are designed and fabricated on the polyimide(PI) substrate. The flexible waveguide is endowed with excellent structural reliability and mechanical flexibility by constructing multiple neutral surfaces. The resultant flexible multimode optical polymer waveguides exhibit lower propagation loss(0.16 dB/cm at 850 nm) and lower inter-channel crosstalk(<-40 dB). Excellent mechanical bending property of the flexible waveguides(bending radius less than 3 mm) is also achieved by using micron-mechanical designs to minimize strain exerted on the waveguide core layer during mechanical deformation process. The transmission loss is not significantly increased when the bending radius is 1 mm and the bending is repeated 1000 times. Besides, the reliability test results reveal that the optimized flexible waveguide has excellent thermal stability, aging resistance, and machinability, for which, the resultant flexible waveguides show no performance degradation after humidity cycling, temperature cycling, and lead-free reflow soldering tests. Hence, this work provides theoretical and technical guidance for the practical mass-production of high quality flexible polymer waveguides with excellent mechanical flexibility and environmental reliability.

关 键 词：光学器件 柔性聚合物波导 传输损耗 通道间串扰 性能可靠性 

分 类 号：TN252[电子电信—物理电子学]