MEMS平面微起爆器的原位构筑及性能  

In-situ Construction and Performance Study of MEMS Detonator

作　　者：张方[1] 陈建华[1] 王燕兰[1] 张蕾[1] 卢飞朋 韩瑞山 李少群 ZHANG Fang;CHEN Jian-hua;WANG Yan-lan;ZHANG Lei;LU Fei-peng;HAN Rui-shan;LI Shao-qun(Science and Technology on Applied Physical Chemistry Laboratory,Shaanxi Applied Physics‑Chemistry Research Institute,Xi′an 710061,China)

机构地区：[1]陕西应用物理化学研究所应用物理化学国家级重点实验室,陕西西安710061

出　　处：《含能材料》2022年第4期356-362,共7页Chinese Journal of Energetic Materials

摘　　要：设计了一种微机电系统(MEMS)平面微起爆器并对其性能进行了研究。该微起爆器由MEMS微结构换能元和直写起爆装药两部分组成。金属微结构换能元和装药构筑在同一平面上。首先在氮化硅硅片上构造Ni/Cr微结构换能元,然后在微结构换能元的一侧刻蚀微装药腔体,微结构换能元的桥区部分构造在微装药腔体的内部。采用微控直写法,在微装药腔体内部写入一种具有多孔性质的纳米铜墨水前驱体,经过气固原位叠氮化反应后,形成叠氮化铜(Cu(N_(3))_(2))MEMS起爆器件。该微起爆器平均电阻为4Ω,作用时间为8.44μs,50%发火电压为14.29 V,发火能量为0.33 mJ,装药量平均值5.18mg,质量相对标准偏差2.6%。该微起爆器能够起爆六硝基六氮杂异伍兹烷(CL⁃20)炸药。The in⁃situ construction and performance of a MEMS(micro⁃electro⁃mechanical system)planar micro detonator were introduced.The micro detonator was composed of MEMS Ni/Cr heater and direct⁃writing primary charge,constructed on the same plane of a silicon nitride wafer.The primary explosive cavity was etched on one side of the Ni/Cr heater,and the bridge of the heater is constructed inside the cavity.The porous copper precursor ink was written into the cavity and was converted into copper azide primary explosive by in⁃situ azidation reaction and the MEMS detonator was obtained.The average resistance of the micro detonator is about 4Ω,with the initiation delay time of 8.44μs,the 50%initiation voltage of 14.29 V,and the initiation energy of 0.33 mJ.The average charge of the detonator is 5.18 mg with a mass RSD(relative standard deviation)of 2.6%.The detonator can detonate the hxanitrohexaazaisowurtzitane(CL⁃20)secondary explosive reliably and completely.

关 键 词：微起爆器 微机电系统(MEMS) Cu(N_(3))_(2) 直写 原位 

分 类 号：TJ55[兵器科学与技术—军事化学与烟火技术] O64[理学—物理化学]