回音壁微腔激光器电老化试验及寿命分析  

Electrical Aging Test and Lifetime Analysis of Whispering-Gallery-Mode Micro-Cavity Lasers

作　　者：樊碤润 肖金龙[2,3] 杨跃德 郝友增[2,3] 黄勇涛 黄永箴 Fan Yingrun;Xiao Jinlong;Yang Yuede;Hao Youzeng;Huang Yongtao;Huang Yongzhen(School of Microelectronics,University of Chinese Academy of Sciences f Beijing 100049,China;State Key Laboratory of Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;Center of Materials Science and Optoelectronics Engineering f University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院大学微电子学院,北京100049 [2]中国科学院半导体研究所集成光电子学国家重点实验室,北京100083 [3]中国科学院大学材料科学与光电工程中心,北京100049

出　　处：《中国激光》2022年第6期1-7,共7页Chinese Journal of Lasers

基　　金：国家重点研发计划(2018YFB2200601)、中国科学院战略性先导科技专项(B类)(XDB43000000)。

摘　　要：为了考察深刻蚀结构的回音壁模式半导体微腔激光器的寿命,采用恒电流模式对InGaAsP/InP多量子阱耦合双圆微腔激光器进行了电老化试验,电流应力为100mA,老化总时长为1400h。对比了电老化试验前期、中期和后期器件的输出光谱和功率-电压-电流(P-V-I)特性,以器件稳定工作的电老化中期为例分析了器件的性能。分析了输出功率和阈值电流随时间的变化情况,判断出在电老化试验期间器件退化模式始终为渐进模式。以器件输出功率降到初始值的50%作为失效判据标准,在100mA电流下,器件的寿命约为1200h。Objective Whispering-gallery-mode(WGM)semiconductor micro-cavity lasers have the characteristics of small sizes,high quality factors,and easy integration,and have a wide range of potential applications in on-chip photonic integration,microwave photonics and other fields.Semiconductor lasers will degrade and even fail due to catastrophic optical damages,facet oxidation,electrostatic damages and degradation of electrodes and bonds in operation,which influence the reliability of their application systems.Especially,the WGM micro-cavity adopts the deep etching structure etched through active layers,different from other laser cavities.The deep etching structure is used to realize total internal reflection at the dielectric boundary with a high-low refractive index contrast for a small bending radius,but it also brings a lot of defects and damages to the etching interface including the active layer,especially the nonradiative recombination centers.The non-radiative recombination centers absorb the photons released in the radiative recombination process and become the dark spot defects.The energy emitted by the non-radiative recombination is transformed into lattice vibrations through phonon emission and can give rise to the low-temperature defect motion.Thus the dislocations in the active layer begin to be generated and deformed.Simultaneously,the etching interface absorbs the energy emitted by the non-radiative recombination,its temperature rises and defects increase.The generated heat becomes more and further promotes the increase of defects.The high optical field intensity at the etching interface of WGM micro-cavity laser will also accelerate the expansion of defects and damage.Therefore,the deep etching structure accelerates the degradation of WGM micro-cavity lasers.In order for them to work stably in their application system,it is necessary to study the reliability of WGM micro-cavity lasers that has not been studied before,and to examine their lifetime at optimum operating conditions.Methods In order to analyze

关 键 词：激光器 微腔 可靠性 电老化试验 电流应力 寿命 

分 类 号：TN248.4[电子电信—物理电子学]