基于全介质超表面的微流体折射率传感器  

Microfluidic Refractive Index Sensor Based on All-Dielectric Metasurfaces

作　　者：陈颖[1] 张敏 丁志欣 周健 赵蒙 李美洁 王建坤 朱奇光[2] Chen Ying;Zhang Min;Ding Zhixin;Zhou Jian;Zhao Meng;Li Meijie;Wang Jiankun;Zhu Qiguang(Hebei Province Key Laboratory of Test/Measurement Technology and Instrument,School of Electrical Engineering,Yanshan University,Qinhuangdao,Hebei 066004,China;Hebei Province Key Laboratory for Special Fiber and Fiber Se?isor,School of Information Science arid Engineering,YanShan University,Qinhuangdao,Hebei 066004,China)

机构地区：[1]燕山大学电气工程学院,测试计量技术与仪器河北省重点实验室,河北秦皇岛066004 [2]燕山大学信息科学与工程学院,河北省特种光纤与光纤传感器重点实验室,河北秦皇岛066004

出　　处：《中国激光》2022年第6期159-168,共10页Chinese Journal of Lasers

基　　金：国家自然科学基金(61201112)、河北省重点研发计划(19273901D,20373301D)、河北省自然科学基金(F2020203066)、中国博士后基金(2018M630279)、河北省博士后择优资助项目(D2018003028)、河北省高等学校科学技术研究项目(ZD2018243)。

摘　　要：基于全介质超材料的电磁属性,提出了一种基于硅缺口盘单谐振器的超表面微流传感装置;利用时域有限差分(FDTD)法进行仿真模拟,仿真结果表明,该结构可以产生三重Fano共振,包括可被入射光直接激发的明偶极共振以及非对称性结构下明暗模式干扰产生的一个高阶模式杂化共振和一个磁共振。另外,分析了结构参数(缺口长度和宽度、结构的周期、硅盘半径和厚度)对Fano共振的影响以及微流装置中分析物厚度对传感特性的影响,得到参数优化后的结构的灵敏度最大可达到400.36nm/RIU,品质因数Q最大可达到1252.3,并证明了溶液厚度在一定范围内增大可以提升传感检测的性能。Objective This paper proposes a microfluidic sensing device with a metasurface of a single silicon-notched disk resonator based on the electromagnetic properties of all-dielectric metamaterials.The simulation of the finite-difference time-domain(FDTD)method shows that the structure can generate triple Fano resonances,which include a bright dipole resonance directly excited by incident light,a high-order hybrid resonance,and a magnetic resonance generated by the interference of bright and dark modes under an asymmetric structure.In addition,the impact of structural parameters on Fano resonances and the thickness of the analyte covered in the microfluidic device on sensing characteristics are investigated.The sensitivity of the structure after optimizing parameters can reach a maximum of 400.36 nm/RIU and the quality factor Q can reach a maximum of 1252.3,and it is proven that increasing the thickness of the solution within a certain limit can improve the performance of sensor detection.Methods Under the influence of a light field,the dielectric material can produce magnetic(first-order Mie resonance)and electrical resonances(second-order Mie resonance),which can effectively avoid the ohmic loss caused by metal plasma resonance and improve the sensing detection performance.Fano resonance originates from the destructive interference between the bright mode(or superradiation mode)and dark mode(or subradiant mode)in the near field,and the light field is enhanced by forming an ultra-narrowband spectral response.Based on the basic theory of Mie resonance and the property of Fano resonance,a metasurface of notched silicon disk is proposed,which is combined with a microfluidic device for liquid sensing detection.The spectral response can be observed using the FDTD method for simulation.When the structure is symmetrical,the incident light can directly excite the electric dipole resonance,but when the symmetry of the structure is broken,the electromagnetic phenomenon changes completely.The dark mode in the structure is exci

关 键 词：传感器 全介质超表面 Fano共振 微流体传感检测 折射率传感 

分 类 号：O436[机械工程—光学工程]