Photonic lattice-like waveguides in glass directly written by femtosecond laser for on-chip mode conversion  

作　　者：Yuying Wang Lijing Zhong Zhi Chen Dezhi Tan Zaijin Fang Yi Yang Shengzhi Sun Luyun Yang jianrong Qiu 王宇莹;钟理京;陈智;谭德志;方再金;杨弈;孙盛芝;杨旅云;邱建荣(Ningbo Femto&Nano Laser Technology Co.,Ltd.,Ningbo 315000,China;Zhejiang Lab,Hangzhou 311100,China;Guangdong Provincial Key Laboratory of Optical Fiber Sensing and Communications,Institute of Photonics Technology,Jinan University,Guangzhou 511443,China;State Key Laboratory of Modern Optical Instrumentation,College of Optical Science and Engineering,Zhejiang University,Hangzhou 310027,China;Laboratory of Infrared Materials and Devices,The Research Institute of Advanced Technologies,Ningbo University,Ningbo 315211,China;Wuhan National Laboratory for Optoelectronics,Huazhong University of Science and Technology,Wuhan 430074,China)

机构地区：[1]Ningbo Femto&Nano Laser Technology Co.,Ltd.,Ningbo 315000,China [2]Zhejiang Lab,Hangzhou 311100,China [3]Guangdong Provincial Key Laboratory of Optical Fiber Sensing and Communications,Institute of Photonics Technology,Jinan University,Guangzhou 511443,China [4]State Key Laboratory of Modern Optical Instrumentation,College of Optical Science and Engineering,Zhejiang University,Hangzhou 310027,China [5]Laboratory of Infrared Materials and Devices,The Research Institute of Advanced Technologies,Ningbo University,Ningbo 315211,China [6]Wuhan National Laboratory for Optoelectronics,Huazhong University of Science and Technology,Wuhan 430074,China

出　　处：《Chinese Optics Letters》2022年第3期57-61,共5页中国光学快报（英文版）

基　　金：This work was supported by the National Key R&D Program of China(No.2021YFB2800500);National Natural Science Foundation of China(Nos.U20A20211,51902286,61775192,61905215,51772270,62105297,and 61905093);Zhejiang Provincial Natural Science Foundation(No.LQ22F050022);State Key Laboratory of High Field Laser Physics,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,and Fundamental Research Funds for the Central Universities.

摘　　要：We report on a conceptually new type of waveguide in glass by femtosecond laser direct writing,namely,photonic latticelike waveguide(PLLW).The PLLWfs core consists of well-distributed and densified tracks with a sub-micron size of 0.62μm in width.Specifically,a PLLW inscribed as hexagonal-shape input with a ring-shape output side was implemented to converse Gaussian mode to doughnut-like mode,and high conversion efficiency was obtained with a low insertion loss of 1.65 dB at 976 nm.This work provides a new freedom for design and fabrication of the refractive index profile of waveguides with sub-micron resolution and broadens the functionalities and application scenarios of femtosecond laser direct-writing waveguides in future 3D integrated photonic systems.

关 键 词：femtosecond laser glass material laser direct-writing waveguide light mode conversion 

分 类 号：TN249[电子电信—物理电子学]