泡生法晶体炉提拉系统静动态特性分析  

Analysis on Static and Dynamic Characteristics of Crystal Furnace Raising System by Kyropoulos Method

作　　者：李鑫 仵晨 杨军良[1] 耿祥晨 张金诚 郑旭鸿 LI Xin;WU Chen;YANG Junliang;GENG Xiangchen;ZHANG Jincheng;ZHENG Xuhong(School of Mechanical and Precision Instrument Engineering,Xi'an University of Technology,Xi'an 710048,China)

机构地区：[1]西安理工大学机械与精密仪器工程学院,西安710048

出　　处：《机械工程师》2022年第4期43-45,共3页Mechanical Engineer

摘　　要：在实际泡生法蓝宝石晶体生产过程中发现,籽晶杆在引晶时期总是会出现振动,极大地影响了液面的稳定性,容易造成晶体缺陷。文中以LJ-200型号泡生法蓝宝石晶体炉提拉系统为研究对象,利用有限元分析的方法完成了满加载情况下的提拉系统静力分析和引晶时期提拉系统的动态特性分析,得到了系统在极限工况下的静力变形云图、固有频率和前6阶振型。找到了提拉系统中产生振动的原因和系统中的薄弱环节,为防止共振和进一步优化提拉系统提供了理论依据。In the actual kyropoulos sapphire crystal production process,it is found that the seed rod always vibrates during the seeding period,which greatly affects the stability of the liquid level and easily causes crystal defects.This paper takes LJ-200 model kyropoulos sapphire crystal furnace pulling system as the research object,and uses the finite element analysis method to complete the static analysis of the pulling system under full load and the dynamic characteristics of the pulling system during the seeding period.The static deformation cloud diagram,natural frequency and the first six modes of the system under extreme conditions are obtained.The reason for the vibration in the lifting system and the weak link in the system are found,which provides a theoretical basis for preventing the occurrence of resonance and further optimizing the lifting system.

关 键 词：晶体炉 泡生法 提拉系统 静动态特性 有限元方法 

分 类 号：O782[理学—晶体学]