聚焦电子束辐照诱导喷金SiO_(x)纳米线新型结构加工  

Novel Structure Fabrication of Gold-Sprayed SiO_(x) Nanowires Induced by Focused Electron Beam Irradiation

作　　者：潘鹏 季雪梅 苏江滨[1,2] 朱贤方 何祖明 唐斌[1] 郎咸忠[1] Pan Peng;Ji Xuemei;Su Jiangbin;Zhu Xianfang;He Zuming;Tang Bin;Lang Xianzhong(Experiment Center of Electronic Science and Technology,School of Microelectronics and Control Engineering,Changzhou University,Changzhou 213164,China;China-Australia Joint Laboratory for Functional Nanomaterials,School of Physics Science and Technology,Xiamen University,Xiamen 361005,China)

机构地区：[1]常州大学微电子与控制工程学院电子科学与技术实验中心,江苏常州213164 [2]厦门大学物理科学与技术学院中国-澳大利亚功能纳米材料联合实验室,福建厦门361005

出　　处：《微纳电子技术》2022年第3期264-271,277,共9页Micronanoelectronic Technology

基　　金：国家自然科学基金资助项目(11574255);江苏省基础研究计划(自然科学基金)资助项目(BK20191453);江苏省研究生科研创新计划资助项目(KYCX21_2825,KYCX21_2819)。

摘　　要：在纳米加工技术中,利用透射电子显微镜(TEM)中的电子束辐照诱导低维纳米材料制备异质结构的加工方式因具有广阔的应用前景而备受瞩目。利用成熟的聚焦电子束原位辐照技术,通过改变电子束辐照时的强度和位置对喷金非晶SiO_(x)纳米线进行原位辐照,诱导其结构发生变化,从而实现结构加工。实验结果显示,当束斑直径大于纳米线直径的聚焦电子束辐照纳米线中心时,成功制备了一种SiO_(x)-Au-SiO_(x)新型纳米桥状异质结构,而当减小电子束的束斑直径而增强辐照强度后,Au纳米桥轴向伸长并最终断裂形成另一种新型Au纳米针尖结构。为了丰富加工类型,通过将电子束聚焦于纳米线边缘实现了对纳米线的切割加工。此外,还原位观察研究了非晶SiOx纳米线表层Au纳米颗粒在加工过程中的形貌结构变化,确定Au纳米颗粒的生长是聚集和塑形共同作用的结果。对喷金非晶SiOx纳米线新型结构的加工为将来纳米电子器件连接装置的制造和扫描探针探测技术的应用提供了一种新思路,同时也为以后的纳米线器件电子束加工实验提供了一些参考。Among the nanofabrication technologies,the fabrication of heterostructures induced by electron beam irradiation of low dimensional nanomaterials in transmission electron microscope(TEM)has attracted much attention due to its broad application prospect.With the mature technology of in-situ focused electron beam irradiation,in-situ irradiation of Au-sprayed amorphous SiO_(x) nanowires was carried out by changing the intensity and position of electron beam irradiation to induce their structures change,and the structural fabrication was realized.The experimental results show that a novel SiO_(x)-Au-SiO_(x) nanobridge heterostructure is successfully prepared when the center of the nanowire is irradiated by a focused electron beam with the beam spot diameter larger than the diameter of nanowires.However,when the irradiation intensity is enhanced by reducing the beam spot diameter of the electron beam,the Au nanobridge elongates axially and finally breaks to form another new Au nanotip structure.To enrich the processing types,the nanowires were cut by focusing the electron beam on the edge of the nanowires.Furthermore,the changes of morphology and structure of Au nanoparticles on the surface of amorphous SiO_(x) nanowires during processing were studied by in-situ observation.It is confirmed that the growth of Au nanoparticles is the result of aggregation and shaping.The novel structure fabrication of Au-sprayed amorphous SiO_(x) nanowires provides a new idea for the fabrication of connecting appliance of electronic nanodevices and the application of scanning probe detection technology.At the same time,it also provides some references for the future electron beam processing experiments of nanowires-based devices.

关 键 词：纳米材料 纳米线 透射电子显微镜(TEM) 聚焦电子束辐照 纳米针尖 

分 类 号：TB383[一般工业技术—材料科学与工程]