Low-threshold wavelength-tunable ultraviolet vertical-cavity surface-emitting lasers from 376 to 409 nm  

作　　者：Yang Mei Tian-Rui Yang Wei Ou Zhong-Ming Zheng Hao Long Lei-Ying Ying Bao-Ping Zhang 

机构地区：[1]Department of Microelectronics and Integrated Circuits,Laboratory of Micro/Nano-Optoelectronics,School of Electronic Science and Engineering,Xiamen University,Xiamen 361005,China

出　　处：《Fundamental Research》2021年第6期684-690,共7页自然科学基础研究（英文版）

基　　金：supported by the National Key Research and Development Program of China(Grants No.2017YFE0131500 and 2016YFB0400803);the National Natural Science Foundation of China(Grants No.U1505253 and 62104204).

摘　　要：Optically pumped wavelength-tunable vertical-cavity surface-emitting lasers(VCSELs)operating in the ultraviolet A(UVA)spectrum were demonstrated.The VCSELs feature double dielectric distributed brag reflectors and a wedge-shaped cavity fabricated using the substrate transfer technique and laser lift off,resulting in a graded cavity length in one device.A resonant period gain structure is used in the InGaN/GaN multi-quantum well active region to enhance the coupling between the cavity mode field and the active layers.The optical field inside the cavity is modulated by the cavity length;thus,tunable lasing at different wavelengths is realized at different points of a single VCSEL chip.The lasing wavelength extends from 376 to 409 nm,covering most of the UVA band below the band gap of GaN.The threshold pumping power density of the UVA VCSELs at different wavelengths ranges from 383 to 466 kW/cm^(2),which is among the lowest values for ultraviolet(UV)VCSELs.This study is promising for the development of small-footprint,power-efficient UV light sources.

关 键 词：UVA VCSELs Wavelength-tunable Wedge-shaped cavity Resonant period gain 

分 类 号：TN248[电子电信—物理电子学]