钨及其合金超精密抛光研究进展  

Research Progress in Ultra-precision Polishing of Tungsten and Its Alloys

作　　者：许良 王林 陈泓谕 杭伟[1] 吕冰海[1] 袁巨龙[1] XU Liang;WANG Lin;CHEN Hong-yu;HANG Wei;LYU Bing-hai;YUAN Ju-long(Ultra-precision Machining Center,College of Mechanical Engineering,Zhejiang University of Technology,Hangzhou 310023,China)

机构地区：[1]浙江工业大学机械工程学院超精密加工研究中心,杭州310023

出　　处：《表面技术》2022年第4期24-36,共13页Surface Technology

基　　金：国家自然科学基金(51905485);浙江省自然科学基金(LY21E050011);浙江省公益技术研究项目(LGG19E050021);浙江省高校基本科研业务费项目(RF-A2020003)。

摘　　要：钨及其合金是当今高新技术产业重要的基础材料。近年来,科技的发展对材料表面质量提出了更高的要求,因此在特定条件下有必要对钨及其合金进行超精密抛光。聚焦高效、高质量、低损伤抛光,结合国内外相关研究,对适用于钨及其合金的超精密抛光方法如化学机械抛光(CMP)、电化学抛光(ECP)、磁流变抛光(MRF)、电流变抛光(ERP)、力流变抛光(FRP)进行了综述,阐述了各种抛光方法的加工原理、特点及其材料去除机理。从加工效率、加工精度、加工成本、环保等方面进行比较,概述了各种抛光方法的优势及其局限性。考虑到钨及其合金不同的应用需求,适用的抛光方法不尽相同。CMP、ECP主要用于钨及其合金的高效抛光,但存在抛光液污染的问题。MRF、FRP则可实现复杂曲面的超精密抛光,是较有前景的抛光新方法。最后从丰富理论体系、优化抛光工艺、注重经济环保3个方面对钨及其合金超精密抛光的发展趋势进行了展望。Tungsten and its alloys are important basic materials in the high-tech industry at present.In recent years,the development of science and technology has put forward higher requirements on the surface quality of materials.Therefore,it is necessary to carry out ultra-precision polishing of tungsten and its alloys under specific conditions.Focusing on high efficiency,high quality and low damage polishing,combined with relevant studies at home and abroad,this paper reviewed ultra-precision polishing methods for tungsten and its alloys,such as Chemical mechanical polishing(CMP),Electrochemical polishing(ECP),Magneto-rheological finishing(MRF),Electrorheological polishing(ERP)and Force-induced rheological polishing(FRP).The processing principle,characteristics and material removal mechanism of these polishing methods were also described.Advantages and limitations of each polishing method were compared from the aspects of processing efficiency,processing precision,cost and environmental protection,etc.Considering the different application requirements of tungsten and its alloys,different polishing methods are applicable.CMP and ECP are most widely used in the industrial field,and both can realize high efficiency and high precision polishing of tungsten and its alloys.However,there are problems that the polishing slurry is highly corrosive and the waste slurry would pollute the environment.What’s more,the polishing slurry is also bound to affect the surface material of the workpiece.MRF,ERP and FRP belong to flexible polishing,which can control the polishing process by changing the external field conditions.The above three methods have higher processing accuracy,better processing quality and less processing damage layer.However,the preparation process of magnetic abrasives in MRF is complicated,and the polishing slurry is unstable.ERP has a low removal rate and high equipment requirements,which makes the processing cost relatively high.As an emerging polishing technology,FRP combines high efficiency and high quality,ca

关 键 词：钨合金 超精密抛光 表面质量 低损伤 力流变抛光 

分 类 号：TH161[机械工程—机械制造及自动化]