A prototype portable instrument employing micro-preconcentrator and FBAR sensor for the detection of chemical warfare agents  

作　　者：Xu Yan Hemi Qu Ye Chang Wei Pang Xuexin Duan 

机构地区：[1]State Key Laboratory of Precision Measuring Technology and Instruments,Tianjin University,Tianjin 300072,China [2]College of Precision Instrument and Optoelectronics Engineering,Tianjin University,Tianjin 300072,China [3]Key Laboratory of Advanced Energy Materials Chemistry(Ministry of Education),Nankai University,Tianjin 300071,China

出　　处：《Nanotechnology and Precision Engineering》2022年第1期43-48,共6页纳米技术与精密工程（英文）

基　　金：The authors gratefully acknowledge financial support from the National Natural Science Foundation of China(NSFC Nos.62174119 and 21861132001);the National Key R&D Program of China(2018YFE0118700);Tianjin Applied Basic Research and Advanced Technology(17JCJQJC43600);the 111 Project(B07014);the Foundation for Talent Scientists of Nanchang Institute for Micro-technology of Tianjin University.

摘　　要：The presence of chemical warfare agents(CWAs)in the environment is a serious threat to human safety,but there are many problems with the currently available detection methods for CWAs.For example,gas chromatography–mass spectrometry cannot be used for in-field detection owing to the rather large size of the equipment required,while commercial sensors have the disadvantages of low sensitivity and poor selectivity.Here,we develop a portable gas sensing instrument for CWA detection that consists of a MEMSfabricated micro-preconcentrator(μPC)and a film bulk acoustic resonator(FBAR)gas sensor.The μPC is coated with a nanoporous metal–organic framework material to enrich the target,while the FBAR provides rapid detection without the need for extra carrier gas.Dimethyl methylphosphonate(DMMP),a simulant of the chemical warfare agent sarin,is used to test the performance of the instrument.Experimental results show that the μPC provides effective sample pretreatment,while the FBAR gas sensor has good sensitivity to DMMP vapor.The combination of μPC and FBAR in one instrument gives full play to their respective advantages,reducing the limit of detection of the analyte.Moreover,both the μPC and the FBAR are fabricated using a CMOS-compatible approach,and the prototype instrument is compact in size with high portability and thus has potential for application to in-field detection of CWAs.

关 键 词：Micro-preconcentrator Film bulk acoustic resonator Chemical warfare agent Microelectromechanical system 

分 类 号：TH83[机械工程—仪器科学与技术] TP212[机械工程—精密仪器及机械]