氮化硅膜层对侧视角白画面色偏的影响及发红改善  

Influence of SiNxfilm on off-angle color shift of white screen and reddish improvement

作　　者：叶成枝 操彬彬 吕艳明 马力 安晖 彭俊林 冯耀耀 杨增乾 栗芳芳 陆相晚 李恒滨 YE Cheng-zhi;CAO Bin-bin;LYU Yan-ming;MA Li;AN Hui;PENG Jun-lin;FENG Yao-yao;YANG Zeng-qian;LI Fang-fang;LU Xiang-wan;LI Heng-bin(Hefei Xinsheng Optoelectronics Technology Co.,Ltd.,Hefei 230001,China)

机构地区：[1]合肥鑫晟光电科技有限公司,安徽合肥230001

出　　处：《液晶与显示》2022年第4期467-474,共8页Chinese Journal of Liquid Crystals and Displays

摘　　要：研究了TFT基板中氮化硅膜层对TFT-LCD终端产品侧视角白画面色偏的影响,填补了TFT膜层与TFT-LCD侧视角白画面色偏的研究欠缺,为类似的光学色度不良改善提供了有益的参考。通过大量的实验测试和仿真模拟,探索了氧化硅膜层厚度对侧视角白画面色偏的影响规律。结果表明,氮化硅膜层是一个影响色偏量和色偏方向的关键因素,其中栅极绝缘层(GI)和第一钝化绝缘层(PVX1)对色偏的影响较大,而第二钝化绝缘层(PVX2)对色偏的影响较小,氮化硅厚度与白画面侧视角色偏程度呈非线性相关。以某款HADS产品为例,其中氮化硅膜层包括栅极绝缘层(320nm)、第一钝化绝缘层(100 nm)和第二钝化绝缘层(200 nm)。基于单因子实验结果和模拟结果,综合考虑电学特性和产能影响,采用PVX1140 nm作为改善条件,对侧视角白画面发红改善有效,即宏观观察无发红现象且实测数据都满足产品规格。Research on the relationship of SiNxfilm to off-angle color shift on white screen is carried out.The research in this paper fills in the lack of research of correlation between TFT film and off-angle color shift of TFT-LCD,and provides a useful reference for the improvement of similar optical chromaticity defects in other products.Through experimental measurement and software simulation,the influence of the thickness of the silicon nitride film on the color shift coordinates is explored.Experimental results show that the silicon nitride film layer is a key factor affecting the color shift,GI and PVX1 have a greater impact on color shift,while PVX2 has a little impact on color shift,and the thickness of the SiNxis nonlinearly related to off-angle color shift on white screen.Taking a HADS product for example,the SiNxfilm layer includes gate insulating layer(320 nm),1st passivation insulator layer(100 nm),2nd passivation insulator layer(200 nm).Based on single-factor experimental and simulation results,comprehensively considering the electrical characteristics and production capacity,the reddish on white screen from the viewing angle is improved effectively when PVX1140 nm is used as the condition.That means there is no reddish by macroscopic observation and the measured data meets product specifications.

关 键 词：薄膜晶体管液晶显示器 氮化硅膜层 光学色度 侧视角色偏 全白画面 

分 类 号：TN141.9[电子电信—物理电子学] O439[机械工程—光学工程]