皮米量级微位移信号处理分辨力的光纤布拉格光栅探针系统  

Fiber Bragg grating probe system with picometer-level micro-displacement signal processing resolution

作　　者：刘芳芳[1] 杨子涵 焦宇辉 李红莉[1] 夏豪杰[1] LIU Fangfang;YANG Zihan;JIAO Yuhui;LI Hongli;XIA Haojie(Anhui Province Key Laboratory of Measuring Theory and Precision Instrument,School of Instrument Science and Opto-Electronics Engineering,Hefei University of Technology,Hefei 230009,China)

机构地区：[1]合肥工业大学仪器科学与光电工程学院测量理论与精密仪器安徽省重点实验室,安徽合肥230009

出　　处：《光学精密工程》2022年第7期755-764,共10页Optics and Precision Engineering

基　　金：国家自然科学基金面上项目(No.51975180,No.51975179)。

摘　　要：为了实现超高分辨力的微位移测量,建立了基于光纤布拉格光栅传感的高灵敏度探针系统,研究了静态锁相放大技术,用于检测小于纳米量级的微位移信号。根据光纤布拉格光栅传感原理,设计了高灵敏度的双光栅自补偿解调系统结构。基于信号特征研究了静态锁相放大技术,用于实时检测处理微弱测量信号。最后,通过探针系统的性能测试实验可获得灵敏度和分辨力等参数。实验结果表明:探针系统在接触区域的微位移测量范围约为1μm,灵敏度为-15.33 mV/nm,短期噪声极差的均值为0.83 mV,标准差为0.32 mV,信号处理分辨力约为0.06 nm(60 pm),其标准差为0.02 nm(20 pm)。该系统采用光纤布拉格光栅传感技术达到了皮米量级的微位移信号处理分辨力,满足微纳测量系统的抗干扰性强、重复性好等要求,且系统成本较低。To measure micro-displacement with ultra-high resolution,a high sensitivity probe system based on fiber Bragg grating(FBG)sensing was established and static phase-locked amplification was studied.According to the principle of FBG sensing,the structure of a dual grating self-compensating demodulation system was designed for high sensitivity.Then,based on the signal characteristics,the static phaselocked amplification technique was studied for real-time detection and processing of weak measurement signals.Finally,the system performance parameters including sensitivity and resolution were obtained through the performance experiment.The experimental results show that the micro-displacement measurement range of the probe system in the contact region is approximately 1μm,the sensitivity is-15.33mV/nm,the mean value of the short-term noise range is 0.83 mV,the standard deviation is 0.32 mV,the signal processing resolution is approximately 0.06 nm(60 pm),and the standard deviation is 0.02 nm(20 pm).Hence,the micro-displacement signal processing resolution of this FBG system reaches the picometer level.In addition,the system meets the requirements of strong anti-interference,good repeatability,and low cost.

关 键 词：光纤布拉格光栅 微位移测量 信号处理分辨力 皮米量级 高灵敏度探针系统 静态锁相放大 

分 类 号：TN253[电子电信—物理电子学] TH822[机械工程—仪器科学与技术]