一种精确计算电离规灵敏度的模拟方法  

Sensitivity Calculation of Ionization Gauge Based on an Accurate Numerical Method

作　　者：魏建平 李得天[1] 成永军[1] 侯颖杰 葛金国 姚鹏 张虎忠[1] WEI Jianping;LI Detian;CHENG Yongjun;HOU Yingjie;GE Jinguo;YAO Peng;ZHANG Huzhong(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China)

机构地区：[1]兰州空间技术物理研究所,兰州730000

出　　处：《真空科学与技术学报》2022年第3期170-177,共8页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金项目(62171208)。

摘　　要：对电离规灵敏度进行模拟计算是预测和优化其性能的关键。提出了一种基于离散电子轨迹片段的离散化方法,用于精确计算理论灵敏度。将考虑边界条件变化的电离规工作过程的基本理论模型表示为由许多离散片段组成的时间线性电子轨道。在每个微小的时间间隔内,通过构造有效电离空间计算和筛选离散的有效电子轨迹片段,并利用Binary-Encounter-Bethe模型计算电离截面。然后采用离散化方法求解电离规灵敏度,使收集效率和电离截面误差减小。热阴极和冷阴极电离规的实验和理论结果证明了该方法的有效性。理论结果与实验结果吻合较好。冷阴极和热阴极电离计的模拟偏差分别低于5.6%和4.5%。Numerical study on the sensitivity of the ionization gauge is critical for predicting and optimizing its performance.A discretization method based on the discrete electron trajectory fragments to accurately calculate theoretical sensitivity is proposed in this paper.The fundamental theoretical model of the ionization gauge operation process considering boundary condition variation is expressed as a time linear electronic trajectory composed of many discrete segments.In each tiny time interval,the discrete effective electron trajectory fragments are calculated and screened by constructing the effective ionization space,and the ionization cross section is calculated with the help of Binary-Encounter-Bethe model.Then the ionization gauge sensitivity is solved using the discretization method to a small error of collection efficiency and ionization cross section.The effectiveness of the method is demonstrated by the results of hot-cathode and cold-cathode ionization gauges experimentally and theoretically.The theoretical results are in good agreement with the experiments.The simulation deviation is below 5.6%,4.5%for cold cathode and hot cathode ionization gauge,respectively.

关 键 词：电离规 灵敏度 碳纳米管阴极 热阴极电离规 

分 类 号：TB772.3[一般工业技术—真空技术]