光束线超高真空阀多参数状态监测系统设计  

Design of Multi-Parameter Condition Monitoring System for Ultra-High Vacuum Valve on Beam Line

作　　者：刘群[1] 徐帆 汪啸[1] 陈留国 贺博[1] LIU Qun;XU Fan;WANG Xiao;CHEN Liuguo;HE Bo(National Synchrotron Radiation Laboratory,University of Science and Technology of China,Hefei 230029,China)

机构地区：[1]中国科学技术大学国家同步辐射实验室,合肥230029

出　　处：《真空科学与技术学报》2022年第3期178-184,共7页Chinese Journal of Vacuum Science and Technology

基　　金：中央高校基本科研业务费专项资金项目(WK2310000086)。

摘　　要：光束线良好的运行状态是用户正常实验和存储环安全运行的重要保障。为提高光束线的关键设备超高真空阀故障的诊断能力与运维水平,在合肥光源现有光束线控制系统的基础上,开展了超高真空阀门的状态监测研究。本文给出了超高真空阀的多参数状态监测实现方法,获取了超高真空阀门开关动作的数据波形,同时在实验物理和工业控制系统(EPICS)平台下建立了阀门的状态数据库,实现了数据的远程共享。The good operation state of the beam line is an important guarantee for the user’s normal experiment and the safe operation of the storage ring.Based on the existing beam line control system of HLS,this paper studies the condition monitoring system for ultra-high vacuum valve by a variety of sensors.A multi-parameter condition monitoring system for ultra-high vacuum has been developed for key equipment of beam line in National Synchrotron Radiation Laboratory.At the same time,the status database is established by EPICS(Experimental Physics and Industrial Control System)and realizes the remote data sharing.Due to the implementation of the system,the diagnosis ability and maintenance level of equipment for beam line is enhanced.

关 键 词：超高真空阀 状态监测 故障诊断 实验物理和工业控制系统 

分 类 号：TP277[自动化与计算机技术—检测技术与自动化装置] TL362.7[自动化与计算机技术—控制科学与工程]