基于有限元优化压电式喷头结构研究  

Optimization of Piezoelectric Printhead Structure Based on Finite Element

作　　者：秦新智 叶芸[1,2] 段燕宇 李思杰 陈恩果 徐胜[1,2] 郭太良 QIN Xinzhi;YE Yun;DUAN Yanyu;LI Sijie;CHEN Enguo;XU Sheng;GUO Tailiang(College of Physics and Information Engineering,Fuzhou University,Fuzhou 350100,China;Fujian Science&Technology Innovation Laboratory for Optoelectronic Information of China,Fuzhou 350100,China)

机构地区：[1]福州大学物理与信息工程学院,福州350100 [2]中国福建光电信息科学与技术创新实验室,福州350100

出　　处：《真空科学与技术学报》2022年第3期217-222,共6页Chinese Journal of Vacuum Science and Technology

基　　金：福建省科技厅重大专项项目(2021HZ021001);中国福建光电信息科学与技术创新实验室项目(2020ZZ112);国家重点研发计划项目(2017YFB0404604)。

摘　　要：压电式喷墨打印作为非接触、高效率、高灵活性的数字化薄膜制备工艺,广泛应用于多种领域。针对高精度压电式喷头制作难度大、价格昂贵等问题。本文基于有限元分析建立了压电式喷头驱动模型,分析了正弦波振幅、PZT材料的厚度和石英毛细管道的厚度三个因素对压电式喷头径向位移的复合作用,并通过正交实验法确定了三因素对径向位移的影响主次顺序。数值仿真及正交实验结果表明:PZT材料厚度为0.1 mm、石英管厚度为0.1 mm,驱动波形振幅达到120 V时,压电式喷头内部径向位移达到最大值0.15μm。在压电式喷头处形成的墨滴出射顺利,且下落状态稳定。此外对压电式喷头内部结构进行数学建模,得到了墨滴体积与喷头径向位移的经验公式。本文通过仿真模型的建立与分析,向压电式喷头的核心制造工艺提供了理论基础,降低了其制造难度与成本,对于大力发展高精度压电式喷墨打印技术具有重要意义。Piezoelectric inkjet printing is widely used in a variety of fields as a non-contact,high-efficiency,and high-flexibility digital film preparation process.The issue is that high precision piezoelectric printheads are difficult and expensive to fabricate.In this paper,a piezoelectric printhead driving model was established based on finite element analysis.The combined effects of the sinusoidal wave amplitude,the thickness of PZT materials,and the quartz capillary channel on the radial displacement of the piezoelectric printhead were analyzed.And the primary and secondary order of the three factors on the radial displacement were determined by the orthogonal experiment analysis.The results of numerical simulation and orthogonal experiments demonstrated that the internal radial displacement of the piezoelectric printhead reached a maximum value of 0.15μm when the thickness of PZT was 0.1 mm,the thickness of quartz tube was 0.1 mm,and the driving waveform amplitude reached 120 V.The ink droplets formed at the piezoelectric printhead were ejected smoothly and fell more steadily.In addition,the mathematical model for the internal structure of the piezoelectric printhead was built.Based on it,the empirical formula of the volumes of ink droplets and the radial displacement of the printhead was obtained.Here,the theoretical basis was proposed for the core manufacturing process of the piezoelectric printhead through the establishment and analysis of the simulation model,which reduces its manufacturing difficulty and cost.It is of great significance for the vigorous development of high-precision piezoelectric inkjet printing technology.

关 键 词：压电式喷墨打印 数值仿真 正交实验 墨滴体积 

分 类 号：TN141[电子电信—物理电子学] TN873.3