氧化石墨烯在半导体加工用O形圈全氟醚橡胶材料中的应用  

Application of Graphene Oxide in Perfluoroether Rubber Materials of O-ring for Semiconductor Processing

作　　者：张世鑫 魏海东 储民 ZHANG Shixin;WEI Haidong;CHU Min(Zhejiang Chuangcheng Polymer Material Co.,Ltd,Shaoxing 310000,China;Beijing Research and Design Institute of Rubber Industry Co.,Ltd,Beijing 100143,China)

机构地区：[1]浙江创城高分子材料有限公司,浙江绍兴310000 [2]北京橡胶工业研究设计院有限公司,北京100143

出　　处：《橡胶工业》2022年第4期279-283,共5页China Rubber Industry

摘　　要：研究氧化石墨烯(GO)用量对GO/全氟醚橡胶(FFKM)复合材料物理性能、压缩永久变形和耐介质性能的影响。结果表明:随着GO用量的增大,GO/FFKM复合材料的邵尔A型硬度和高温压缩永久变形变化不大,拉伸强度和撕裂强度先增大后减小;当GO用量为1份时,GO/FFKM复合材料的拉伸强度和撕裂强度最大,耐介质性能较好。GO/FFKM复合材料适用于制备半导体加工用O形圈。The effects of the dosage of graphene oxide(GO) on the physical properties,compression set and dielectric resistance of GO/perfluoroether rubber(FFKM) composites were studied. The results showed that with the increase the dosage of GO,the shore A hardness and high temperature compression set of the GO/FFKM composites changed little,and the tensile strength and tear strength increased at first and then decreased. When the dosage of GO was 1 phr,the tensile strength and tear strength of the GO/FFKM composites were the largest and the dielectric resistance was better. The GO/FFKM composites were suitable for the O-rings for semiconductor processing.

关 键 词：氧化石墨烯 全氟醚橡胶 复合材料 O形圈 压缩永久变形 耐介质性能 

分 类 号：TQ330.383[化学工程—橡胶工业] TQ333.93