Tip-Based Nanomachining on Thin Films:A Mini Review  

作　　者：Shunyu Chang Yanquan Geng Yongda Yan 

机构地区：[1]Key Laboratory of Micro-Systems and Micro-Structures Manufacturing of Ministry of Education,Harbin Institute of Technology,Harbin 150001,China [2]Center for Precision Engineering,Harbin Institute of Technology,Harbin 150001,People's Republic of China

出　　处：《Nanomanufacturing and Metrology》2022年第1期2-22,共21页纳米制造与计量（英文）

基　　金：This study was funded by the National Natural Science Foundation of China(51911530206,52035004);Natural Science Foundation of Heilongjiang Province of China(YQ2020E015);Self-Planned Task(SKLRS202001C)of State Key Laboratory of Robotics and System(HIT),“Youth Talent Support Project”of the Chinese Association for Science and Technology,and the Fundamental Research Funds for the Central Universities.

摘　　要：As one of the most widely used nanofabrication methods,the atomic force microscopy(AFM)tip-based nanomachining technique offers important advantages,including nanoscale manipulation accuracy,low maintenance cost,and flexible experimental operation.This technique has been applied to one-,two-,and even three-dimensional nanomachining patterns on thin films made of polymers,metals,and two-dimensional materials.These structures are widely used in the fields of nanooptics,nanoelectronics,data storage,super lubrication,and so forth.Moreover,they are believed to have a wide application in other fields,and their possible industrialization may be realized in the future.In this work,the current state of the research into the use of the AFM tip-based nanomachining method in thin-film machining is presented.First,the state of the structures machined on thin films is reviewed according to the type of thin-film materials(i.e.,polymers,metals,and two-dimensional materials).Second,the related applications of tip-based nanomachining to film machining are presented.Finally,the current situation of this area and its potential development direction are discussed.This review is expected to enrich the understanding of the research status of the use of the tip-based nanomachining method in thin-film machining and ultimately broaden its application.

关 键 词：Atomic force microscopy Tip-based nanomachining Thin films NANOSTRUCTURE Application 

分 类 号：O48[理学—固体物理]