音叉振动电容式表面电位测量装置设计  

Design of capacitive surface potential measuring device by using tuning fork vibration

作　　者：于海军 王鹢[1] 赫伟东 孙迎萍[1] 张海燕 YU Haijun;WANG Yi;HE Weidong;SUN Yingping;ZHANG Haiyan(Laboratory of Science and Technology on Material Performance Evaluation in Space Environment,Lanzhou Institute of Physics,Lanzhou 730000,China;The 49th Research Institute of China Electronics Technology Group Corporation,Harbin 150028,China)

机构地区：[1]兰州空间技术物理研究所空间环境材料行为及评价技术重点实验室,兰州730000 [2]中国电子科技集团公司第四十九研究所,哈尔滨150028

出　　处：《航天器环境工程》2022年第2期169-174,共6页Spacecraft Environment Engineering

摘　　要：文章针对振动电容式表面电位测量传感器核心组件——振动音叉进行详细设计,分析得出适用于电位检测的音叉振动形式,确定出音叉结构参数及驱动方式;进行基于传递函数的传感器灵敏度及精度影响因素分析;提出基于电荷感应与静电场仿真的电位测量装置设计方法,得到的传感器灵敏度与理论计算结果一致,并最终通过样机标定实验验证了传感器设计的正确性。The vibration tuning fork is designed to be the core component of the vibration capacitance surface potential detection sensor.The vibration form of the tuning fork relevant with the potential detection is analyzed,and the structural parameters and the driving mode of the tuning fork are determined;The factors influencing the sensitivity and the accuracy of the sensor are analyzed based on the transfer function;A method is proposed for designing the potential measurement device based on the charge induction and the electrostatic field simulation.The sensitivity of the sensor is consistent with the theoretical calculation results.Finally,the sensor design is verified by the prototype calibration experiment.

关 键 词：表面电位测量 传感器设计 音叉 振动电容法 静电场仿真 

分 类 号：V423.9[航空宇航科学与技术—飞行器设计]