基于倾斜入射的直角棱镜大面测量装置研究  

Research on hypotenuse-face measurement method of rectangular-prism based on oblique incidence

作　　者：朱贵博 王青[1] 陈巍 ZHU Guibo;WANG Qing;CHEN Wei(School of Electronic and Optical Engineering,Nanjing University of Science and Technology,Nanjing 210094,China)

机构地区：[1]南京理工大学电子工程与光电技术学院,江苏南京210094

出　　处：《光学仪器》2022年第2期65-71,共7页Optical Instruments

基　　金：国家自然科学基金(61975081)。

摘　　要：针对直角棱镜大面测量中可以消除多重干涉背景干扰的倾斜入射测量系统,设计了一种能直接进行直角棱镜大面测量的正置式倾斜入射干涉仪装置。该装置包括相移干涉仪主机、一体化载物工作台以及一对参考平晶。讨论了直角面参与反射带来的光线簇造成的多重干涉背景误差,采用3D偏折的方法来避免全内反射光干扰直角棱镜大面测量。实验部分,组装了基于倾斜入射的正置式相移干涉仪,并完成光路调校与参数标定,实现了直角棱镜大面面形的测量;使用白光轮廓仪对被测棱镜大面进行比对测量,结果一致。解决了直角棱镜条的测量问题,实现了微棱镜工业化在线测量,在直角棱镜加工中具有重要的应用价值。The oblique incidence measurement system that can eliminate multiple interference in the measurement of rectangular-prism hypotenuse-face is studied,and an upright oblique incidence measurement device that can directly measure rectangular-prism hypotenuse-face is designed.The device includes a phase-shift interferometer host,integrated loading table and a pair of reference flats.The multiple interference background errors caused by the light clusters due to the reflection of the right angle surface are discussed.The method of 3D deflection is used to avoid the interference of the total internal reflection light to the measurement of the hypotenuse-face of the rectangular-prism.An upright phase-shift interferometer based on oblique incidence was assembled,and the optical path adjustment and parameter calibration is completed.The measurement of the hypotenuse-face of the rectangular-prism is realized.The white light profiler is used to measure the hypotenuse-face of the measured prism,and the results are consistent.It solves the measurement problem of the rectangular-prism strips,realizes the industrialized online measurement of microprisms,and has important applications in the processing of rectangular-prisms.

关 键 词：直角棱镜 空间光线簇 倾斜测量 多重干涉 

分 类 号：TH741[机械工程—光学工程]