三维自组装氧化锌纳米花的制备及其气敏性能  

Preparation and Gas-Sensitive Properties of Three-Dimensional Self-Assembled ZnO Nanoflowers

作　　者：韩新宁[1] 廖港丽 崔慧娜 董文斌 赵震 姚垚[1] Han Xinning;Liao Gangli;Cui Huina;Dong Wenbin;Zhao Zhen;Yao Yao(College of Chemistry and Chemical Engineering,Ningxia Normal University,Guyuan 756000,China)

机构地区：[1]宁夏师范学院化学化工学院,宁夏固原756000

出　　处：《半导体技术》2022年第4期296-301,306,共7页Semiconductor Technology

基　　金：宁夏重点研发计划项目(2019BEB04019);固原市科技计划项目(2020GYKYF011);宁夏高等学校一流学科建设(教育学学科)资助项目(NXYLXK2017B11);大学生科技创新基金资助项目(Z202003);大学生创新创业训练计划资助项目(16-2421,S202110753022)。

摘　　要：以乙酸锌为前驱体,采用一步溶剂热法成功制备了三维(3D)自组装氧化锌(ZnO)纳米花(NF),并采用X射线衍射仪(XRD)、场发射扫描电子显微镜(FESEM)和X射线光电子能谱仪(XPS)对样品的晶相结构、形貌及化学组成进行表征。研究了3D-ZnO NF基气体传感器对乙醇蒸气的气敏传感性能,与商用ZnO气体传感器相比,基于3D-ZnO NF的传感器具有更高的灵敏度。在最佳工作温度(420℃)下,3D-ZnO NF基气体传感器对体积分数为5×10^(-4)乙醇气体的响应值高达66,是商用ZnO气体传感器对其响应值的5倍以上;此外,其理论检测限由2.456×10^(-5)降低到2.67×10^(-6),响应时间和恢复时间分别由40 s和15 s缩短到21 s和24 s。3D-ZnO NF优异的传感性能源于其较大的比表面积和测试过程中更快的电荷传输,这为进一步研究纳米构建优化气敏传感材料检测挥发性有机化合物的发展奠定了基础。Three-dimensional(3D)self-assembled ZnO nanoflowers(ZnO NFs)were successfully prepared through one-step solvothermal method with zinc acetate as the precursor.The crystal structure,morphology and chemical composition were characterized by X-ray diffractometer(XRD),field emission scanning electron microscope(FESEM)and X-ray photoelectron spectrometer(XPS).Gas-sensitive properties of the 3D-ZnO NF based gas sensor to ethanol gas were investigated.Compared with the commercial ZnO gas sensor,the sensor based on 3D-ZnO NFs exhibits higher sensitivity.At optimum operating temperature(420℃),the response of the 3D-ZnO NF based gas sensor to ethanol vapor with a volume fraction of 5×10^(-4) is as high as 66,which is more than 5 times that of the commercial ZnO sensor.In addition,the theoretical detection limit is reduced from 2.456×10^(-5) to 2.67×10^(-6),and the response time and recovery time were shortened from 40 s and 15 s to 21 s and 24 s,respectively.The excellent sensing performance of 3D-ZnO NFs is ascribed to the larger specific surface area and faster charge transport during the test process,which lays a foundation for further research on the development of nanostructured optimized gas sensing materials for volatile organic compounds detection.

关 键 词：氧化锌(ZnO) 溶剂热法 气体传感器 乙醇 响应时间 恢复时间 

分 类 号：TB383[一般工业技术—材料科学与工程]