中红外量子级联激光器的光子集成(特邀)  

Photonics integration of mid-infrared quantum cascade laser(Invited)

作　　者：朱纯凡 王贤耿 汪祥 王瑞军 Zhu Chunfan;Wang Xiangeng;Wang Xiang;Wang Ruijun(School of Electronic and Information Technology,Sun Yat-sen University,Guangzhou 510000,China)

机构地区：[1]中山大学电子与信息工程学院,广东广州510000

出　　处：《红外与激光工程》2022年第3期53-59,共7页Infrared and Laser Engineering

基　　金：光电材料与技术国家重点实验室自主课题(OEMT-2021-PZ-01)。

摘　　要：中红外光子集成芯片在环保监测、医疗诊断和国防安全等领域具有广泛的应用前景,但激光光源与无源波导光路的片上集成仍是中红外集成光学需要攻克的关键难题之一。量子级联激光器(QCL)是中红外波段的重要半导体激光光源,文中介绍了近几年中红外QCL在光子集成方面的研究进展,包括InP基单片集成、硅基单片集成、硅基异质键合集成和Ⅲ-Ⅴ/锗混合外腔激光器。Mid-infrared photonic integrated circuits have been attracting a lot of interest for applications in environmental monitoring, medical diagnosis and national defense. However, the integration of laser sources with low-loss mid-infrared waveguide circuits is challenging. Quantum cascade lasers(QCLs) are important semiconductor laser sources operating in the mid-infrared spectral range. In this review paper, the research progress of the photonics integration of mid-infrared QCLs in recent years was introduced. Several different approaches were reviewed, including monolithic integration on InP, monolithic integration on silicon,heterogeneous integration on silicon and Ⅲ-Ⅴ/Germanium hybrid external cavity laser.

关 键 词：量子级联激光器 光子集成 中红外 硅基光子学 光学传感 

分 类 号：TN248[电子电信—物理电子学] TN256