多电极圆柱型DBD等离子体发生器的仿真分析  

Simulation Analysis of Multi-Electrode Cylindrical Dielectric Barrier Discharge Plasma Generator

作　　者：辛纪威 李占贤 XIN Ji-wei;LI Zhan-xian(College of Mechanical Engineering,North China University of Science and Technology,Tangshan 063210,China;Hebei Robot Industrial Technology Research Institute,Tangshan 063210,China)

机构地区：[1]华北理工大学机械工程学院,河北唐山063210 [2]河北省工业机器人产业技术研究院,河北唐山063210

出　　处：《机械工程与自动化》2022年第2期59-61,64,共4页Mechanical Engineering & Automation

摘　　要：针对多电极圆柱介质阻挡放电(Dielectric Barrier Discharge,DBD)等离子体发生器进行了仿真分析,主要对不同外加电压、放电长度、相邻外电极间距和电极宽度对电场强度的影响进行了研究。研究结果表明:随着外加电压的升高,石英玻璃表面的电场强度逐渐增大,越容易产生介质阻挡放电等离子体;放电长度为50 mm时石英玻璃表面的电场强度大于放电长度分别为10 mm、70 mm及30 mm的石英玻璃表面的电场强度;相邻外电极间距为10 mm时石英玻璃表面的电场强度大于相邻外电极间距分别为6 mm、4 mm及8 mm的石英玻璃表面的电场强度;电极宽度为5 mm时石英玻璃表面的电场强度大于电极宽度分别为8 mm、3 mm和10 mm的石英玻璃表面的电场强度。研究结果可为等离子体发生器的优化设计提供良好的理论基础。The simulation analysis of the multi-electrode cylindrical dielectric barrier discharge(DBD)plasma generator is carried out,and the influence of different applied voltage,discharge length,distance between adjacent external electrodes and electrode width on the electric field intensity is mainly studied.The research results show that with the increase of the applied voltage,the electric field intensity on the surface of the quartz glass gradually increases,and the dielectric barrier discharge plasma is more likely to be generated.When the discharge length is 50 mm,the electric field strength on the quartz glass surface is greater than that on the quartz glass surface with the discharge lengths of 10 mm,70 mm and 30 mm,respectively.When the distance between adjacent external electrodes is 10 mm,the electric field intensity on the surface of quartz glass is greater than that on the surface of quartz glass when the distance between adjacent external electrodes is 6 mm,4 mm and 8 mm,respectively.When the electrode width is 5 mm,the electric field intensity on the quartz glass surface is greater than that on the quartz glass surface with electrode widths of 8 mm,3 mm and 10 mm,respectively.The research results can provide a good theoretical basis for the optimal design of the plasma generator.

关 键 词：多电极 DBD等离子体发生器 仿真分析 

分 类 号：TP391.9[自动化与计算机技术—计算机应用技术]