改善波浪纹的液晶屏切割技术  

Cutting Wave Defect Improvement with the Scribing Procedure

作　　者：伍飞高 刘钦启 王海荣 刘富青 罗词广 刘明辉 WU Feigao;LIU Qinqi;WANG Hairong;LIU Fuqing;LUO Ciguang;LIU Minghui(HEFEIXINSHENG OPTOELECTRONICS TECHNOLOGY Co.,Ltd.,MDL Engineering Dept.,Hefei 230012,CHN)

机构地区：[1]合肥鑫晟光电科技有限公司,MDL技术部,合肥230012

出　　处：《光电子技术》2022年第1期57-63,共7页Optoelectronic Technology

摘　　要：通过对切割工艺进行实验设计,基于多刀头自动切割机的特点及同一刀头走形重复精度高且误差小的理论前提,使用同刀轮辅助裂片工艺进行研究。结果显示,在同刀轮辅助的裂片作用下,通过控制切割工艺,切割良率得到有效提升;通过调整辅助切割线的位置及切割压力,波浪纹的发生率得到有效控制。研究得出结论:1.在后切刀轮经过交叉点后,高速移动时直线性得不到保证,波浪纹可能发生;2.保证先切刀轮正常切割,降低后切刀轮的刀压及追加辅助切割线,可以降低交叉点对后切刀轮的不利影响;3.采用同一刀轮作为辅助刀轮,辅助裂片精度由0.5 mm大幅度提升到10μm以内,波浪纹不良率从0.1%降低到0.01%。By testing different DOE conditions of cutting process,and based on the characteristics of automatic cutting machine,the same cutter process with high repeated accuracy and the auxiliary cutting process with the same wheel were used.Results:Under the effect of auxiliary cutting,the cutting yield could be effectively improved by controlling the cutting process. By adjusting the position of the auxiliary scribing line and cutting pressure,the wave defects were effectively controlled.Conclusions:1. With wheel going through the cross point,the linearity was not guaranteed and wavy lines were found;2.Methods were effective that ensuring normal wheel pressure applied during the first cutting,reducing the pressure of the second cutting and adding additional auxiliary cutting,and then the negative impact of second cutting could be weakened;3. By using the same wheel as auxiliary cutting wheel,the accuracy of auxiliary cutting line was significantly improved from 0.5 mm to 10 μm,and the defect ratio was improved from 0.1% to 0.01%.

关 键 词：薄膜晶体管液晶显示器 液晶玻璃 刀轮 切割工艺 不良改善 

分 类 号：TN141[电子电信—物理电子学]