低浓度氟化氢标准气体的FTIR分析方法研究  

Use of FTIR for Analyzing Hydrogen Fluoride Standard Gas at Low Concentrations

作　　者：李龙 张体强[2] 姚强 胡树国[2] 邱妮 邓保家 张盈 张施令 盖良京[2] LI Long;ZHANG Ti-qiang;YAO Qiang;HU Shu-guo;QIU Ni;DENG Bao-jia;ZHANG Ying;ZHANG Shi-ling;GAI Liang-jing(State Grid Chongqing Electric Power Research Institute,Chongqing 400022,China;National Institute of Metrology,Beijing 100029,China)

机构地区：[1]国网重庆市电力公司电力科学研究院,重庆400022 [2]中国计量科学研究院,北京100029

出　　处：《计量学报》2022年第3期433-436,共4页Acta Metrologica Sinica

基　　金：渝电科技项目(2019-38#);国家标准物质资源共享平台项目(28-APT1902-10)。

摘　　要：提出一种基于FTIR的氟化氢标准气体分析方法,使用其特征吸收区域(波数4100~4300 cm^(-1))进行定量分析。通过稀释方法形成120、100、80.0、60.0、40.0、20.0μmol/mol共6个浓度点的氟化氢标准气体,并对其重复性、标准曲线线性、检出限进行考察。结果显示:在20.0~120μmol/mol范围内仪器响应值与标气浓度呈线性,R^(2)为0.9979;各浓度点的重复性介于0.34%~1.1%之间;检出限约为2.04μmol/mol。A method was proposed for analyzing hydrogen fluoride(HF) standard gas with low concentrations by using FTIR, of which the characteristic absorption region between 4 100~4 300 cm^(-1) was used to identify and determine HF. A series of gas mixtures were prepared through the dilution of a mother cylinder standard, and produced 6 lower concentrations: 120, 100, 80.0, 60.0, 40.0, 20.0 μmol/mol. Furtherly, the repeatability, linearity, and limit of detection(LOD) were evaluated. The results showed that the response value of the instrument is linear with the concentration of standard gas in the range of 20.0~120 μmol/mol, and R^(2) is 0.997 9;the repeatability of each concentration point is between 0.34%~1.1%;the detection limit is about 2.04 μmol/mol.

关 键 词：计量学 氟化氢 标准气体 傅里叶变换红外光谱法 

分 类 号：TB99[一般工业技术—计量学]