沟槽电极型声表面波耐高温谐振器的制备  

Manufacturing Process of SAW Resonators with Grooved Electrodes for High Temperature Application

作　　者：张启轮 单清川 李桦林 骆伟 史汝川 郝文昌 尹玉刚 韩韬[1] ZHANG Qilun;SHAN Qingchuan;LI Hualin;LUO Wei;SHI Ruchuan;HAO Wenchang;YIN Yugang;HAN Tao(Dept.of Instrument Science and Engineering,Shanghai Jiaotong University,Shanghai 200240,China;The 26th Research Institute of China Electronics Technology Group Corporation,Chongqing 400060,China;Beijing Research Institute of Telemetry,Beijing 100076,China)

机构地区：[1]上海交通大学仪器科学与工程系,上海200240 [2]中国电子科技集团公司第二十六研究所,重庆400060 [3]北京遥测技术研究所,北京100076

出　　处：《压电与声光》2022年第2期175-179,共5页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金与航天先进制造技术研究联合基金资助项目(U1837210)。

摘　　要：声表面波(SAW)传感器在高温环境的需求日益增多,硅酸镓镧因为具有良好的高温特性而提供了耐高温压电基底,但是电极在高温条件下会发生团聚而失效。该文设计了一种沟槽电极结构的耐高温SAW谐振器,采用Pt作为电极,硅酸镓镧作为压电基底,并提出了沟槽结构叉指电极的制造工艺,对沟槽结构的形貌进行了表征。通过提高沉积温度改善Pt电极质量,最终制备的波长8μm、沟槽电极厚240 nm的谐振器在1000℃下可稳定工作。The demand of surface acoustic wave(SAW)sensors for high temperature is increasing.Langasite provides high-temperature-resistant piezoelectric substrate because of good high-temperature characteristics,however,the electrode will lose its performance due to agglomeration at high temperature.In this paper,a surface acoustic wave resonator with grooved electrodes for high temperature is designed.Pt is used as electrode and langasite is used as piezoelectric substrate.The manufacturing process of the grooved electrodes is proposed and the morphology of the grooved electrode is characterized.The quality of Pt electrodes is improved by increasing the deposition temperature.Finally,a resonator with the wavelength of 8μm and grooved IDTs of 240 nm in thickness is prepared which can work stably at 1000℃.

关 键 词：声表面波(SAW) 硅酸镓镧(LGS) 沟槽电极 高温 PT电极 

分 类 号：TN65[电子电信—电路与系统] TP212[自动化与计算机技术—检测技术与自动化装置]