压电MEMS兰姆波器件技术的最新进展与展望  

Recent Advances and Prospects of Lamb Wave Devices Based on Piezo-MEMS

作　　者：于晓权[1] 何杰[2] 马晋毅[2] YU Xiaoquan;HE Jie;MA Jinyi(The 24th Research Institute of China Electronics Technology Corporation,Chongqing 400060,China;The 26th Research Institute of China Electronics Technology Corporation,Chongqing 400060,China)

机构地区：[1]中国电子科技集团公司第二十四研究所,重庆400060 [2]中国电子科技集团公司第二十六研究所,重庆400060

出　　处：《压电与声光》2022年第2期223-229,233,共8页Piezoelectrics & Acoustooptics

摘　　要：兰姆波谐振器(LWR)作为一种新兴的压电微机电系统(MEMS)声学器件,同时具有高工作频率、高机电耦合系数、高品质因数值及低功耗等特点,其制造工艺与集成电路工艺兼容,可在单片晶圆上实现多频率器件。基于LWR的声学滤波器是实现高性能射频前端组件的有效解决方案之一,能够满足未来通信设备多频率及集成化的发展要求,其相关研究已成为微声器件领域的热点。该文简要介绍了兰姆波的基本原理,综述了近年来基于氮化铝(AlN)薄膜和铌酸锂薄膜(LNOI)的压电MEMS兰姆波器件研究取得的最新成果,并讨论了压电MEMS兰姆波器件的发展趋势。As an emerging piezoelectric micro-electro-mechanical system(MEMS)acoustic device,the Lamb wave resonator has the features of high operating frequency,high k_(t)^(2),high Q and low power consumption simultaneously.Its process is compatible with the integrated circuits and is promising to realize multi-frequency devices on a single wafer.The acoustic filter based on the Lamb wave resonator is one of the effective solutions to realize high-performance RF front-end modules,which can meet the development requirements of multi-frequency and integration of communication equipment in the future,thus the research on the Lamb wave devices has become a hot spot in the field of micro-acoustic devices.In this paper,the basic principle of the Lamb wave is introduced.The latest achievements in the research on piezoelectric MEMS Lamb wave devices based on AlN thin films and lithium niobate thin films(LNOI)in recent years are reviewed.Finally,the development trends of piezoelectric MEMS Lamb wave devices are discussed.

关 键 词：兰姆波谐振器(LWR) 压电微机电系统(MEMS) 横向激励声体波谐振器(XBAR) 高次谐波组合模式谐振器(CORs) 截面拉梅模式谐振器(CLMRs) 

分 类 号：TN384[电子电信—物理电子学] TN65