一种宽带声表面波滤波器的设计  

The Design of a Wideband SAW Filter

作　　者：陈晓阳 王永安 袁燕 曹玉 CHEN Xiaoyang;WANG Yong’an;YUAN Yan;CAO Yu(Beijing Institute of Radio Measurement,Beijing 100854,China;Beijing Aerospace Micro-electronics Technology CO.,LTD,Beijing 100854,China)

机构地区：[1]北京无线电测量研究所,北京100854 [2]北京航天微电科技有限公司,北京100854

出　　处：《压电与声光》2022年第2期238-241,共4页Piezoelectrics & Acoustooptics

摘　　要：基于大机电耦合系数LiNbO_(3)材料,该文设计了一种激发Love波模式的宽带低损耗声表面波滤波器。研究了不同切向下LiNbO_(3)材料的机电耦合系数,以及不同切向、膜厚下15°YX-LiNbO_(3)的瑞利波激发情况。测试结果表明,采用铜电极对谐振器进行切趾加权抑制横向模式,宽带滤波器可实现较小的插入损耗和较好的通带特性。A wideband and low-loss SAW filter based on the excited Love wave mode of materials with large electromechanical coupling coefficient of LiNbO_(3) designed in this paper。The electromechanical coupling coefficient of LiNbO_(3) materials with different cuts and the Rayleigh wave excitation of 15°YX-LiNbO_(3) materials with different film thickness and cut were studied.The results show that by using the Cu electrodes to apodize and weight the resonator to suppress the transverse mode,the proposed wideband filter can realize lower insertion loss and better passband characteristics.

关 键 词：LiNbO_(3) LOVE波 宽带 声表面波(SAW) 瑞利波 横向模式 

分 类 号：TN65[电子电信—电路与系统] TN384