刻蚀下料机减少返工片的方法研究  

Research of Methods to Reducing Rework of the Etching Unloading Machine

作　　者：王鹏鹏 折飞 Wang Pengpeng;She fei(The 2nd Research Institute of CETC,Taiyuan Shanxi 030024,China)

机构地区：[1]中国电子科技集团公司第二研究所,山西太原030024

出　　处：《国防制造技术》2021年第3期55-57,共3页Defense Manufacturing Technology

摘　　要：通过分析刻蚀下料机产生返工片的原因,提出合理的解决方案,对刻蚀下料机结构进行优化设计,减少返工片的产生。Through analyzing the reasons for the reworked silicon wafers produced by the etching unloading machine,this paper proposes reasonable solutions. The structures of the etching unloading machine are optimized to reduce the production of reworked silicon wafers.

关 键 词：刻蚀下料机 返工片 优化设计 

分 类 号：TM914.4[电气工程—电力电子与电力传动]