步距规动态测量方法研究  

Research on Dynamic Measurement of Step Gauge

作　　者：丁晨[1] 王蔚晨[2] 高宏堂[2] 杨自本[2] DING Chen;WANG Weichen;GAO Hongtang;YANG Ziben

机构地区：[1]安徽省计量科学研究院 [2]中国计量科学研究院

出　　处：《计量与测试技术》2022年第4期17-20,24,共5页Metrology & Measurement Technique

摘　　要：步距规是一种典型的多量值面间距标准器,由于各工作面间相互阻隔,使步距规的校准具有一定难度。本文提出了一种新的测量方法,即应用光切显微镜的测量原理实现被测工作面的精确定位,给激光干涉比长仪提供了各个测量面的触发信号,从而实现了面间距的非接触动态连续测量。根据该方法研制了光学测头,并安装在激光干涉比长仪上进行了测量,分别对测头的定位精度､系统的测量重复性以及测量精度进行了实验,并给出了实验结果。目前,用此方法测量步距规的面间距,重复性可达16nm,测量不确定度优于U=0.1μm+1.5×10^(-6)L,k=2,其中L为被测步距规总长,μm。Step gauge is a typical multi-value standard of plane distance,because of the barrier between the working planes,the calibration of step gauge is difficult.In this paper,a new measuring method is proposed.The method uses the measuring principle of the light-section microscope to realize the precise positioning of the measured working surface,and provides the trigger signal of each measuring surface to the laser interferometer,so as to realize the non-contact dynamic continuous measurement of the plane distance.A novel optical probe is installed on the length measuring instrument based on the laser interferometry.A series of experiments are carried out to investigate locationing precision of the optical probe,repeatability and measuring accuracy of the measuring system.At present,experimental results show that measuring repeatability is better than 16nm,and,measuring uncertainty is less than 0.1μm+1.5×10^(-6)L,with a coverage factor of 2.L is in micrometers.

关 键 词：步距规 面间距测量 精确定位 非接触测量 动态连续测量 

分 类 号：E933.43[军事—军事装备学]