基于半球谐振腔的微光学加速度计结构设计仿真研究  

Simulation research on structure design of micro optical accelerometer based on hemispherical resonant cavity

作　　者：张婷 杨波[1,2] ZHANG Ting;YANG Bo(School of Instrument Science and Engineering,Southeast University,Nanjing 210096,China;Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology,Ministry of Education,Southeast University,Nanjing 210096,China)

机构地区：[1]东南大学仪器科学与工程学院,江苏南京210096 [2]东南大学微惯性仪表与先进导航技术教育部重点实验室,江苏南京210096

出　　处：《传感器与微系统》2022年第5期44-47,52,共5页Transducer and Microsystem Technologies

摘　　要：将微纳半球谐振腔与微机械加速度计结构相结合,设计了一种基于半球谐振腔的微光学加速度计。首先分析了微光学加速度计的基本工作原理,接着分析了反射膜和增透膜材料对微纳腔影响规律,并利用时域有限差分(FDTD)光学仿真软件进行仿真测试,研究了不同膜厚对谐振腔谐振效果的影响。最后基于光强解调原理,利用仿真软件得到光强信号与变化腔长的关系,实现了对输出光强信号的解调,从仿真角度验证了本方案的可行性。A micro optical accelerometer based on hemispherical resonant cavity is designed by combining micro-nano hemispherical resonant cavity with micromachined accelerometer structure.Firstly,the basic working principle of the micro optical accelerometer is analyzed,and the influence law of reflective film and antireflection film material on micro-nano cavity is analyzed.Then,the finite difference time domain(FDTD)optical simulation software is used for simulation test,and the influence of different film thickness on the hemispherical cacity is studied.Finally,based on the principle of intensity demodulation,the relationship between the intensity signal and the changing cavity length is obtained by using the simulation software,and the output intensity is demodulated.The feasibility of this scheme is verified from the perspective of simulation.

关 键 词：半球腔 微光学加速度计 反射膜 增透膜 光强解调 

分 类 号：TP212.1[自动化与计算机技术—检测技术与自动化装置]